Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 2014, Pages 255-258

  Noor, Mimiwaty Mohd ^a   Sugandi, Gandi ^a   Aziz, Mohd Faizal ^a   Majlis, Burhanuddin Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

Gas sensor; membrane; microheater; polyimide

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; HEAT TRANSFER; HEATING EQUIPMENT; MEMBRANE STRUCTURES; MICROELECTROMECHANICAL DEVICES; NITROGEN COMPOUNDS; POLYIMIDES; SILICA; SILICON NITRIDE; SILICON OXIDES;

EFFECTS OF MATERIALS; INSULATOR LAYER; MATERIAL SELECTION; MAXIMUM TEMPERATURE; MEMBRANE MATERIAL; MICROHEATER; SENSOR APPLICATIONS; THERMAL CHARACTERISTICS;

MEMBRANES;

EID: 84908234718     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMELEC.2014.6920845     Document Type: Conference Paper

References (6)

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2. O. Sidek et al "Effect of Heater Geometry on the High Temperature Distribution on a MEMS Micro-hotplate," 3rd Asia Symposium on Quality Electronic Design, pp.100-104, 2011.
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5. Mimiwaty M. Noor, Gandi Sugandi and Burhanuddin Yeop Majlis, "Micro-heater Filament of Polyimide Membrane for Gas Sensor Applications," Proceeding of IEEE International Conference on Semiconductor &Electronics (ICSE2012), pp. 360-362, 2012.
6. Mimiwaty M. Noor, Badariah Bais and Burhanuddin Yeop Majlis. "The effects of temperature and KOH concentration on silicon etching rate and membrane surface roughness," Proceeding of IEEE International Conference on Semiconductor &Electronics (ICSE2002), pp. 524-528, 2002.