Low power consumption micro C2H5OH gas sensor based on micro-heater and ink jetting technique

Sensors and Actuators, B: Chemical

Volumn 217, Issue , 2015, Pages 146-150

  Moon, S E ^a   Lee, H K ^a   Choi, N J ^a   Kang, H T ^a   Lee, J ^a   Ahn, S D ^a   Kang, S Y ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Alcohol; Gas sensor; In2O3; Micro heater; Surface micromachining

Indexed keywords

ALCOHOLS; CHEMICAL SENSORS; ETCHING; GAS DETECTORS; HEATING EQUIPMENT; INDIUM COMPOUNDS; SURFACE MICROMACHINING;

CMOS COMPATIBLE MEMS PROCESS; ETCHING HOLE; ETCHING TIME; IN2O3; LOW-POWER CONSUMPTION; MICRO-HEATERS; PT HEATERS;

ELECTRIC POWER UTILIZATION;

EID: 84930616108     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.10.034     Document Type: Article

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