Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing

Journal of Applied Physics

Volumn 116, Issue 12, 2014, Pages

  Rose, Franck ^a   Wang, Na ^a   Smith, Robert ^a   Xiao, Qi Fan ^a   Inaba, Hiroshi ^b   Matsumura, Toru ^b   Saito, Yoko ^b   Matsumoto, Hiroyuki ^b   Dai, Qing ^a   Marchon, Bruno ^a   Mangolini, Filippo ^c   Carpick, Robert W ^c  

^a WESTERN DIGITAL CORPORATION   (United States)

^b a Western Digital Company   (Japan)

^c UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; CHEMICAL ANALYSIS; HYDROGEN; HYDROGENATION; MOLECULAR DYNAMICS; PASSIVATION; PHOTOLUMINESCENCE; PHOTOLUMINESCENCE SPECTROSCOPY; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; STRUCTURAL ANALYSIS; STRUCTURAL PROPERTIES; VACUUM APPLICATIONS;

DIFFERENT DENSITIES; FACING TARGET SPUTTERING; FILTERED CATHODIC VACUUM ARC; HYDROGENATED DIAMOND; HYDROGENATED DIAMOND LIKE CARBON FILMS; NON-RADIATIVE RECOMBINATIONS; RAMAN AND PHOTOLUMINESCENCE SPECTROSCOPY; STRUCTURAL DIFFERENCES;

DIAMOND LIKE CARBON FILMS;

EID: 84907612003     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4896838     Document Type: Article

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