Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2153-2160

  Li, Hongxuan ^a,b   Xu, Tao ^a   Wang, Chengbing ^a,b   Chen, Jianmin ^a   Zhou, Huidi ^a   Liu, Huiwen ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Annealing; Chemical vapor deposition; Hydrogenated DLC films; Tribological properties

Indexed keywords

ANNEALING; HYDROGENATION; RAMAN SPECTROSCOPY; SILICON WAFERS; TRIBOLOGY;

BALL-ON-DISK TEST RIG; FOURIER TRANSFORMATION INFRARED SPECTROSCOPY NANOINDENTATION; OXYGEN MOLECULES; WEAR TESTING;

DIAMOND LIKE CARBON FILMS;

EID: 33750815712     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.04.018     Document Type: Article

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