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Volumn 31, Issue 2, 2013, Pages

Structural, surface, and thermomechanical properties of intrinsic and argon implanted tetrahedral amorphous carbon

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ARGON; CARBON FILMS; DEPOSITION; STRESS RELIEF; THERMAL DESORPTION SPECTROSCOPY; VACUUM APPLICATIONS;

EID: 84874610149     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4774326     Document Type: Article
Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.