Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Diamond and Related Materials

Volumn 16, Issue 9, 2007, Pages 1746-1751

  Liu, Fan Xin ^a   Yao, Kai Lun ^a,b   Liu, Zu Li ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b INTERNATIONAL CENTRE FOR MATERIALS PHYSICS   (China)

Author keywords

Mixing bonds; Raman spectroscopy; sp3 content; Substrate bias; ta C films

Indexed keywords

AMORPHOUS FILMS; BIAS VOLTAGE; HARD DISK STORAGE; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; ULTRATHIN FILMS;

CARBON ION ENERGY; MIXING BONDS; SUBSTRATE BIAS;

DIAMOND LIKE CARBON FILMS;

EID: 34548011734     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.06.007     Document Type: Article

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