Roughness evolution during growth of hydrogenated tetrahedral amorphous carbon

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 898-903

  Pisana, S ^a   Casiraghi, C ^a   Ferrari, A C ^a   Robertson, J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Plasma CVD; Surface characterization; Surface structure; Tetrahedral amorphous carbon

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; DATA STORAGE EQUIPMENT; DEPOSITION; SURFACE ROUGHNESS; THICKNESS CONTROL;

AMORPHOUS CARBON; OPTICAL STORAGE DEVICES; PLASMA CVD; SURFACE CHARACTERIZATION; TETRAHEDRAL AMORPHOUS CARBON;

CARBON;

EID: 33745228879     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.052     Document Type: Article

References (35)

1. Robertson J. Mater. Sci. Eng., R Rep. 37 (2002) 129
2. Ferrari A.C., and Robertson J. Phys. Rev., B 61 (2000) 14095
3. Casiraghi C., Ferrari A.C., and Robertson J. Phys. Rev., B 72 (2005) 085401
4. Ferrari A.C., Libassi A., Tanner B.K., Stolojan V., Yuan J., Brown L.M., Rodil S.E., Kleinsorge B., and Robertson J. Phys. Rev., B 62 (2000) 11089
5. Ferrari A.C., Robertson J., Beghi M.G., Bottani C.E., Ferulano R., and Pastorelli R. Appl. Phys. Lett. 75 (1999) 1893
6. Morrison N.A., Rodil S.E., Ferrari A.C., Robertson J., and Milne W.I. Thin Solid Films 337 (1999) 71
7. Weiler M., Lang K., Li E., and Robertson J. Appl. Phys. Lett. (1998) 1314
8. Morrison N.A., Muhl S., Rodil S.E., Ferrari A.C., Nesladek M., Milne W.I., and Robertson J. Phys. Status Solidi, A Appl. Res. 172 (1999) 79
9. Weiler M., Sattel S., Giessen T., Jung K., Ehrhardt H., Veerasamy V.S., and Robertson J. Phys. Rev., B 53 (1996) 1594
10. Weiler M., Sattel S., Jung K., Ehrhardt H., Veerasamy V.S., and Robertson J. Appl. Phys. Lett. 64 (1994) 2797
11. Kleinsorge B., Rodil S.E., Adamopoulous G., Robertson J., Grambole D., and Fukarek W. Diamond Relat. Mater. 10 (2001) 965
12. Gatzen H.H., and Beck M. Tribol. Int. 36 (2003) 279
13. Ferrari A.C. Surf. Coat. Technol. 180-181 (2004) 190
14. Casiraghi C., Ferrari A.C., Ohr R., Flewitt A.J., Chu D.P., and Robertson J. Phys. Rev. Lett. 91 (2003) 226104
15. Moseler M., Gumbsch P., Casiraghi C., Ferrari A.C., and Robertson J. Science 309 (2005) 1545
16. Piazza F., Grambole D., Zhou L., Talke F., Casiraghi C., Ferrari A.C., and Robertson J. Diamond Relat. Mater. 13 (2004) 1505
17. Casiraghi C., Ferrari A.C., and Robertson J. Diamond Relat. Mater. 14 (2005) 913
18. Robertson J. Tribol. Int. 36 (2003) 405
19. Goglia P.R., Berkowitz J., Hoehn J., Xidis A., and Stover L. Diamond Relat. Mater. 10 (2001) 271
20. Casiraghi C., Ferrari A.C., Robertson J., Ohr R., Gradowski M.v., Schneider D., and Hilgers H. Diamond Relat. Mater. 13 (2004) 1480
21. Schulke T., Andres A., and Siemroth P. IEEE Trans. Plasma Sci. 25 (1997) 660
22. Teo K.B.K., Rodil S.E., Tsai J.T.H., Ferrari A.C., Robertson J., and Milne W.I. J. Appl. Phys. 89 (2001) 3706
23. Ohr R., Jacoby B., Gradowski M.v., Schug C., and Hilgers H. Surf. Coat. Technol. 174-175 (2003) 1135
24. Peng X.L., Barber Z.H., and Clyne T.W. Surf. Coat. Technol. 138 (2001) 23
25. Sattel S., Robertson J., and Ehrhardt H. J. Appl. Phys. 82 (1997) 4566
26. Casiraghi C., Ferrari A.C., Ohr R., Chu D., and Robertson J. Diamond Relat. Mater. 13 (2004) 1416
27. Barabasi A.-L., and Stanley H.E. Fractal Concepts in Surface Growth (1995), Cambridge University Press, Cambridge
28. Family F., and Vicsek T. J. Phys., A, Math. Gen. 18 (1985) L75
29. Edwards S., and Wilkinson D. Proc. R. Soc. Lond., A 44 (1966) 1039
30. Kardar M., Parisi G., and Zhang Y. Phys. Rev. Lett. 56 (1986) 889
31. Smets A.H.M., Kessels W.M.M., and Sanden M.C.M.v.d. Appl. Phys. Lett. 82 (2003) 865
32. Bray K.R., and Parsons G.N. Phys. Rev., B 65 (2002) 035311
33. Tong W.M., and Williams R.S. Annu. Rev. Phys. Chem. 45 (1994) 401
34. Sinha S.K., Sirota E.B., Garoff S., and Stanley H.B. Phys. Rev., B 38 (1988) 2297
35. Stearns D.G. Appl. Phys. Lett. 62 (1993) 1745