Raman spectroscopy of a-C:H:N films deposited using ECR-CVD with mixed gas

Applied Surface Science

Volumn 253, Issue 16, 2007, Pages 6957-6962

  Liu, Fan Xin ^a   Yao, Kai Lun ^a,b   Liu, Zu Li ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b INTERNATIONAL CENTRE FOR MATERIALS PHYSICS   (China)

Author keywords

a C:H:N; G peak dispersion; Hardness; Raman spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISPERSIONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY;

G PEAK DISPERSION; INTERNAL STRESS;

THIN FILMS;

EID: 34248360403     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.020     Document Type: Article

References (19)

1. Robertson J. Ultra-thin carbon coatings for magnetic storage technology. Thin Solid Films 383 (2001) 81-88
2. Robertson J. Diamond-like amorphous carbon. Mater. Sci. Eng. R 37 (2002) 129-281
3. Beghi M.G., Ferrari A.C., Teo K.B.K., Robertson J., et al. Bonding and mechanical properties of ultra-thin diamond-like carbon films. Appl. Phys. Lett. 81 20 (2002) 3804-3806
4. Kim Y.T., Cho S.M., Choi W.S., Hong B., and Yoon D.H. Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method. Surf. Coat. Technol. 169-170 (2003) 291-294
5. Lacerda R.G., and Marques F.C. Hard hydrogenated carbon films with low stress. Appl. Phys. Lett. 73 5 (1998) 617-619
6. Durand-Drouhin O., Zeinert A., Benlahsen M., Zellama K., Turban G., et al. On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma. Diamond Relat. Mater. 9 (2000) 752-755
7. Zhang W., Wazumi K., Tanska A., and Koga Y. Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor deposition. J. Vac. Sci. Technol. A 21 1 (2003) 6-13
8. Field S.K., Jarratt M., and Teer D.G. Tribological properties of graphite-like and diamond-like carbon coating. Tribol. Int. 37 (2004) 949-956
9. Neuhaeuser M., Hilgers H., Joeris P., White R., and Windeln J. Raman spectroscopy measurements of DC-magnetron sputtered carbon nitride (a-C:N) thin films for magnetic hard disk coatings. Diamond Relat. Mater. 9 (2000) 1500-1505
10. Cheng Y.H., Tay B.K., Lau S.P., Shi X., Qiao X.L., et al. Raman spectroscopy of carbon nitride films deposited using the FCVA technique combined with a radio-frequency nitrogen-ion beam. Appl. Phys. A 73 (2001) 341-345
11. 3 bonding in DLC films using ultraviolet and visible Raman spectroscopy. J. Appl. Phys. 87 (2000) 7283-7289
12. Huang S.M., Sun Z., Liu Y.F., and Hong M.H. Ultraviolet and visible Raman spectroscopy characterization of chemical vapor deposition diamond films. Surf. Coat. Technol. 151-152 (2002) 263-267
13. Ferrari A.C., and Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61 20 (2000) 14095-14107
14. Ferrari A.C., and Robertson J. Resonant Raman spectroscopy of disordered amorphous and diamond-like carbon. Phys. Rev. B 64 7 (2001) 0754141-1-13
15. Robertson J. Detection of carbon nitride by resonant Raman spectroscopy. Diamond Relat. Mater. 13 (2004) 1558-1560
16. Ferrari A.C., Rodil S.E., and Robertson J. Resonant Raman spectra of amorphous carbon nitrides: the G peak dispersion. Diamond Relat. Mater. 12 (2003) 905-910
17. Ferrari A.C. Determination of bonding in diamond-like carbon by Raman spectroscopy. Diamond Relat. Mater. 11 (2002) 1053-1061
18. Casiraghi C., Piazza F., Ferrari A.C., Grambole D., and Robertson J. Bonding in hydrogenated diamond-like carbon by Raman spectroscopy. Diamond Relat. Mater. 14 (2005) 1098-1102
19. Gradowski M.V., Ferrari A.C., Ohr R., Jacoby B., Hilgers H., Adrian H., et al. Resonant Raman characterization of ultra-thin nano-protective carbon layers for magnetic storage devices. Surf. Coat. Technol. 174-175 (2003) 246-252