Hydrogen content estimation of hydrogenated amorphous carbon by visible Raman spectroscopy

Journal of Applied Physics

Volumn 96, Issue 11, 2004, Pages 6348-6352

  Adamopoulos, G ^a,c   Robertson, J ^b   Morrison, N A ^b   Godet, C ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITÉ DE STRASBOURG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; ELECTRON CYCLOTRON RESONANCE; ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGENATION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; ULTRAVIOLET SPECTROSCOPY;

CHEMICAL INERTNESS; CONTENT ESTIMATION; OPTICAL BAND GAP; STRUCTURAL PARAMETERS;

HYDROGEN;

EID: 28844459766     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1811397     Document Type: Article

References (35)

1. J. Robertson, Prog. Solid State Chem. 21, 199 (1991).
2. J. Robertson, Surf. Coat. Technol. 50, 185 (1992).
3. J. Robertson, Mater. Sci. Eng., R. 37, 129 (2002).
4. D. R. McKenzie, Rep. Prog. Phys. 59, 1611 (1996).
5. M. Weiler, S. Sattel, K. Jung, H. Ehrhardt, V. S. Veerasamy, and J. Robertson, Appl. Phys. Lett. 64, 2797 (1994).
6. F. Tuinstra and J. L. Koening, J. Chem. Phys. 53, 1126 (1970).
7. M. A. Tamor and W. C. Vassel, J. Appl. Phys. 76, 3823 (1994).
8. A. C. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000).
9. A. C. Ferrari et al., J. Non-Cryst. Solids 266-269, 765 (2000).
10. A. C. Ferrari, Diamond Relat. Mater. 11, 1053 (2002).
11. N. Wada, P. J. Gaczi, and A. Solin, J. Non-Cryst. Solids 35/36, 543 (1980).
12. K. W. R. Gilkes, H. S. Sands, D. N. Batchelder, J. Robertson, and W. I. Milne, Appl. Phys. Lett. 70, 1980 (1997).
13. V. I. Merkulov, J. S. Lannin, C. H. Munro, S. A. Asher, V. S. Veerasamy, and W. I. Milne, Phys. Rev. Lett. 78, 4869 (1997).
14. G. Adamopoulos, K. W. R. Gilkes, J. Robertson, N. M. J. Conway, B. Y. Kleinsorge, A. Buckley, and D. N. Batchelder, Diamond Relat. Mater. 8, 541 (1999).
15. B. Marchon, J. Gui, K. Grannen, G. C. Rauch, J. W. Ager, III, S. R. P. Silva, and J. Robertson, IEEE Trans. Magn. 33, 3148 (1997).
16. G. Adamopoulos, Ph.D. thesis, Engineering Department, Cambridge Uni versity, 2000.
17. N. M. J. Conway, Ph.D. thesis, Engineering Department, Cambridge University, 1999.
18. P. Bulkin, N. Bertrand, and B. Drevillon, Thin Solid Films 296, 66 (1997).
19. J. Tauc, R. Grigorovici, and A. Vancu, Phys. Status Solidi 15, 627 (1966).
20. G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996).
21. R. F. Egerton, Electron Energy Loss Spectroscopy in the Electron Microscope (Plenum, London, UK, 1986).
22. E. Grassman, G. D. Lempert, J. Kulik, D. Marton, J. W. Rabalais, and Y. Lifshitz, Appl. Phys. Lett. 68, 1214 (1996).
23. S. V. Chemsychov, E. I. Terukov, V. A. Vassilyev, and A. S. Volkov, J. Non-Cryst. Solids 134, 218 (1991).
24. Rusli, G. A. J. Amaratunga, and J. Robertson, Phys. Rev. B 53, 16306 (1996).
25. R. C. Fang, J. Lumin. 48, 631 (1991).
26. J. Wagner and P. Lautenschlager, J. Appl. Phys. 59, 2044 (1986).
27. Rusli, G. A. J. Amaratunga, and S. R. P. Silva, Thin Solid Films 270, 160 (1995).
28. C. W. Chen and J. Robertson, J. Non-Cryst. Solids 227/228, 602 (1998).
29. M. Chhowhalla, J. Robertson, C. W. Chen, S. R. P. Silva, C. A. Davis, and G. A. J. Amaratunga, J. Appl. Phys. 81, 135 (1997).
30. M. Weiler, S. Sattel, T. Giessen, K. Jung, H. Erhardt, V. S. Veerasamy, and J. Robertson, Phys. Rev. B 53, 1594 (1996).
31. R. H. Jarman, G. J. Ray, and R. W. Stadley, Appl. Phys. Lett. 49, 1065 (1986).
32. R. Kleber, K. Jung, J. Muhling, K. Breuer, H. Metz, and F. Engelke, Thin Solid Films 205, 274 (1991).
33. J. Wagner, M. Ramsteiner, Ch. Wild, and P. Koidl, Phys. Rev. B 40, 1817 (1987).
34. G. Adamopoulos, J. Robertson, and D. N. Batchelder, Excitation wavelength effects on the Raman spectrum of amorphous carbon. The PL background slope, in Diamond 2004, Riva del Garda, Trentino, Italy.
35. R. Saleh, I. Ulber, W. Fuhs, and H. Mell, J. Non-Cryst. Solids 164-166, 563 (1993).