Dominant shallow donors in zinc oxide layers obtained by low-temperature atomic layer deposition: Electrical and optical investigations

Acta Materialia

Volumn 65, Issue , 2014, Pages 69-75

  Krajewski, Tomasz A ^a   Dybko, Krzysztof ^a   Luka, Grzegorz ^a   Guziewicz, Elzbieta ^a   Nowakowski, Piotr ^a   Witkowski, Bartlomiej S ^a   Jakiela, Rafal ^a   Wachnicki, Lukasz ^a   Kaminska, Agata ^a   Suchocki, Andrzej ^a,b   Godlewski, Marek ^a,c  

^a INSTITUTE OF PHYSICS   (Poland)

^b KAZIMIERZ WIELKI UNIVERSITY   (Poland)

^c CARDINAL STEFAN WYSZY SKI UNIVERSITY   (Poland)

Author keywords

Atomic layer deposition; Defects; Electrical conductivity (n type); Thin films; Zinc oxide

Indexed keywords

DONOR ACTIVATION; ELECTRICAL CONDUCTIVITY; INTERSTITIAL POSITIONS; LAYER COMPOSITION; OPTICAL ANALYSIS; OPTICAL INVESTIGATION; PHOTOLUMINESCENCE INVESTIGATION; TEMPERATURE DEPENDENT; LOW TEMPERATURES; OXIDE LAYER; SHALLOW DONORS;

ACTIVATION ENERGY; ATOMIC LAYER DEPOSITION; DEFECTS; DEPOSITION; TEMPERATURE; THIN FILMS; ZINC OXIDE;

ZINC OXIDE; ATOMIC LAYER DEPOSITION;

EID: 84890545552     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2013.11.054     Document Type: Article

References (37)

1. C. Klingshirn Chem Phys Chem 8 2007 782
2. R. Grundbacher, K. Chikkadi, and C. Hierold J Vac Sci Technol B 28 2010 1173
3. S.J. Lim, S. Kwon, H. Kim, and J.S. Park Appl Phys Lett 91 2007 183517
4. M. Pra, G. Saba, C. Erlan, and P. Lugli J Comput Electron 7 2008 146
5. N. Huby, G. Tallarida, M. Kutrzeba, S. Ferrari, E. Guziewicz, and L. Wachnicki et al. Microel Eng 85 2008 2442
6. S. Peng, F. Zhuge, X. Chen, X. Zhu, B. Hu, and R. Pan et al. Appl Phys Lett 100 2012 072101
7. E. Katsia, N. Huby, G. Tallarida, B. Kutrzeba-Kotowska, M. Perego, and S. Ferrari et al. Appl Phys Lett 94 2009 143501
8. L.M. Wong, S.Y. Chiam, J.Q. Huang, S.J. Wang, W.K. Chim, and J.S. Pan Solar Energy Mater Solar Cells 95 2011 2400
9. J. Lee, D. Lee, D. Lim, and K. Yang Thin Solid Films 515 2007 6094
10. G. Luka, T. Krajewski, L. Wachnicki, B. Witkowski, E. Lusakowska, and W. Paszkowicz et al. Phys Status Solidi A 207 2010 1568
11. T. Minami Thin Solid Films 516 2008 5822
12. D.C. Look, J.W. Hemsky, and J.R. Sizelove Phys Rev Lett 82 1999 2552
13. D.C. Look, G.C. Farlow, P. Reunchan, S. Limpijumnong, S.B. Zhang, and K. Nordlund Phys Rev Lett 95 2005 225502
14. X.L. Wu, G.G. Siu, C.L. Fu, and H.C. Ong Appl Phys Lett 78 2001 2285
15. A. Van Dijken, E.A. Meulenkamp, D. Vanmaekelbergh, and A. Meijerink J Phys Chem B 104 2000 1715
16. D.M. Hofmann, A. Hofstaetter, F. Leiter, H. Zhou, F. Henecker, and B.K. Meyer et al. Phys Rev Lett 88 2002 045504
17. C.G. Van de Walle Phys Rev Lett 85 2000 1012
18. O. Hamad, G. Braunstein, H. Patil, and N. Dhere Thin Solid Films 489 2005 303
19. S.Y. Tsai, M.H. Hon, and Y.M. Lu J Cryst Growth 326 2011 85
20. W. Jun, and Y. Yintang Mater Lett 62 2008 1899
21. E. Przezdziecka, E. Kaminska, K.P. Korona, E. Dynowska, W. Dobrowolski, and R. Jakiela et al. Semicond Sci Technol 22 2007 10
22. F.X. Xiu, Z. Yang, L.J. Mandalapu, D.T. Zhao, and J.L. Liu Appl Phys Lett 87 2005 252102
23. K. Maeda, M. Sato, I. Niikura, and T. Fukuda Semicond Sci Technol 20 2005 S49
24. E. Guziewicz, M. Godlewski, T. Krajewski, L. Wachnicki, A. Szczepanik, and K. Kopalko et al. J Appl Phys 105 2009 122413
25. V. Miikkulainen, M. Leskela, M. Ritala, and R.L. Puurunen J Appl Phys 113 2013 021301
26. E. Guziewicz, M. Godlewski, T.A. Krajewski, L. Wachnicki, G. Luka, and J.Z. Domagala et al. Phys Status Solidi B 247 2010 1611
27. E. Guziewicz, M. Godlewski, L. Wachnicki, T.A. Krajewski, G. Luka, and S. Gieraltowska et al. Semicond Sci Technol 27 2012 074011
28. L.W. Lai, and C.T. Lee Mater Chem Phys 110 2008 393
29. E.M. Kaidashev, M. Lorenz, H. Von Wenckstern, A. Rahm, H.C. Semmelhack, and K.H. Han et al. Appl Phys Lett 82 2003 3901
30. Y.W. Heo, D.P. Norton, and S.J. Pearton Appl Phys Lett 98 2005 073502
31. A.P. Roth, J.B. Webb, and D.F. Williams Phys Rev B 25 1982 7836
32. T.A. Krajewski, K. Dybko, G. Luka, L. Wachnicki, B.S. Witkowski, and A. Duzynska et al. Phys Status Solidi B 247 2010 1653
33. A. Teke, Ü. Özgür, S. Doǧan, X. Gu, H. Morkoç, and B. Nemeth et al. Phys Rev B 70 2004 195207
34. B.K. Meyer, J. Sann, D.M. Hofmann, C. Neumann, and A. Zeuner Semicond Sci Technol 20 2005 S62
35. Y.S. Nam, S.W. Lee, K.S. Baek, S.K. Chang, J.W. Ryu, and J.H. Song et al. J Kor Phys Soc 53 2008 288
36. D.H. Chi, L.T.T. Binh, N.T. Binh, L.D. Khanh, and N.N. Long Appl Surf Sci 252 2006 2770
37. H. Alves, D. Pfisterer, A. Zeuner, T. Riemann, J. Christen, and D.M. Hofmann et al. Opt Mater 23 2003 33