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ECS Journal of Solid State Science and Technology

Volumn 2, Issue 9, 2013, Pages

The sandwich structure of Ga-doped ZnO thin films grown via H 2O-, O2-, and O3-based atomic layer deposition

(4) Lee, Yueh Lin a Huang, Tzu Hsuan a Ho, Chong Lung a Wu, Meng Chyi a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84887252233 PISSN: 21628769 EISSN: 21628777 Source Type: Journal
DOI: 10.1149/2.043309jss Document Type: Article

Times cited : (11)

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