Ozone ALD of doped ZnO as a transparent metal

ECS Transactions

Volumn 45, Issue 3, 2012, Pages 389-400

  Yuan, Hai ^a   Luo, Bing ^b   Gladfelter, Wayne L ^b   Campbell, Stephen A ^c  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b UNIVERSITY OF MINNESOTA   (United States)

^c University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ALUMINUM COATINGS; ATOMIC LAYER DEPOSITION; GALLIUM; II-VI SEMICONDUCTORS; INDIUM COMPOUNDS; OXIDE MINERALS; OZONE; TIN OXIDES; ZINC OXIDE;

COST TRANSPARENT; HOMOGENEOUS FILMS; INDIUM TIN OXIDE; LAYERED STRUCTURES; TRANSPARENT METALS; TRIETHYL GALLIUMS; TRIMETHYL ALUMINUMS; TRIMETHYLPHOSPHITE;

NANOSYSTEMS;

EID: 84869003649     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3700904     Document Type: Conference Paper

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