Transparent conductive IZO films prepared by atomic layer deposition using DEZn/TMIn and N2O

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Volumn , Issue , 2010, Pages 1337-1338

  Hsiao, Chi Ying ^a   Yang, Jing Hsung ^a   Gong, Jyh Rong ^a   Lyu, Dong Yuan ^b   Lin, Tai Yuan ^b   Lu, Cheng Tao ^c   Lin, Der Yuh ^c  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^c NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BURSTEIN-MOSS SHIFT; CONDUCTIVE PROPERTIES; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HALL MEASUREMENTS; NITROUS OXIDE; OPTICAL TRANSMISSIONS; OPTICAL TRANSMITTANCE; SAPPHIRE SUBSTRATES; TRANSPARENT CONDUCTIVE; TRIMETHYL; VISIBLE SPECTRA;

ABSORPTION SPECTROSCOPY; CONDUCTIVE FILMS; DOPING (ADDITIVES); FIELD EMISSION; FIELD EMISSION MICROSCOPES; INDIUM; LIGHT TRANSMISSION; NANOELECTRONICS; NITROGEN OXIDES; OPTICAL EMISSION SPECTROSCOPY; OPTICAL PROPERTIES; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; ZINC; ZINC OXIDE;

OPTICAL FILMS;

EID: 77951655489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INEC.2010.5424867     Document Type: Conference Paper

References (3)

1. D. Dimova-Malinovska, N. Tzenov, M. Tzolov, L. Vassilev, Materials Science and Engineering B52 (1998) 59-62.
2. H. Gómez, M. de la L. Olvera, Materials Science and Engineering B134 (2006) 20-26.
3. Y. S. Song, J. K. Park, T. W. Kim, C. W. Chung, Thin Solid Films 467 (2004) 117-120.