Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering

Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology

Volumn 227, Issue 7, 2013, Pages 729-737

  Wu, Yanxia ^a,b   Li, Hongxuan ^a   Ji, Li ^a   Liu, Liu ^c   Ye, Yinping ^a   Chen, Jianmin ^a   Zhou, Huidi ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c TIANSHUI NORMAL UNIVERSITY   (China)

Author keywords

A C:H film; Magnetron sputtering; Microstructure; Tribological behavior; Vacuum annealing

Indexed keywords

A-C:H FILMS; FRICTION AND WEAR BEHAVIORS; GRAPHITE-LIKE STRUCTURES; HYDROGENATED AMORPHOUS CARBON FILMS; PIN-ON-DISK TRIBOMETERS; TRIBOLOGICAL BEHAVIORS; UNBALANCED MAGNETRON SPUTTERING; VACUUM-ANNEALING;

AMORPHOUS FILMS; ANNEALING; CARBON FILMS; HARDNESS; MAGNETRON SPUTTERING; METHANE; MICROSTRUCTURE; SURFACE ROUGHNESS; TRIBOLOGY; VACUUM; VACUUM TECHNOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE;

FILM PREPARATION;

EID: 84883885036     PISSN: 13506501     EISSN: 2041305X     Source Type: Journal    
DOI: 10.1177/1350650112469897     Document Type: Article

References (46)

1. Tagawa M, Yokota K, Matsumoto K, et al. Space environmental effects on MoS2 and diamond-like carbon lubricating films: atomic oxygen-induced erosion and its effect on tribological properties. Surf Coat Technol 2007; 202: 1003-1010.
2. Sang HY, Zhang WJ and Wang TM. The effects of oxygen plasma radiation on a-C:H films. Vacuum 2002; 68: 203-209.
3. Rao J, Lawson KJ and Nicholls Jr. The characterisation of e-beam evaporated and magnetron sputtered carbon films fabricated for atomic oxygen sensors. Surf Coat Technol 2005; 197: 154-160.
4. Grill A. Diamond-like carbon: state of the art. Diam Relat Mater 1999; 8: 428-434.
5. Robertson J. Properties of diamond-like carbon. Surf Coat Technol 1992; 50: 185-203.
6. Boutroy N, Pernel Y, Rius JM, et al. Hydrogenated amorphous carbon film coating of PET bottles for gas diffusion barriers. Diam Relat Mater 2006; 15: 921-927.
7. Hopf C, von Keudell A and Jacob W. The influence of hydrogen ion bombardment on plasma-assisted hydrocarbon film growth. Diam Relat Mater 2003; 12: 85-89.
8. Meunier C, Alers P, Marot L, et al. Friction properties of ta-C and a-C:H coatings under high vacuum. Surf Coat Technol 2005; 200: 1976-1981.
9. Donnet C, LeMogne T, Belin M, et al. Diamond-like carbon coatings for vacuum and space tribology. ESA Sp Publ 1997; 410: 227-230.
10. Vercammen K, Meneve J, Dekempeneer E, et al. Study of RF PACVD diamond-like carbon coatings for space mechanism applications. Surf Coat Technol 1999; 120-121: 612-617.
11. Fontaine J. Towards the use of diamond-like carbon solid lubricant coatings in vacuum and space environments. Proc IMechE Part J: J Engineering Tribology 2008; 222: 1015-1029.
12. McKenzie DR, Muller D and Pailthorpe BA. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon. Phys Rev Lett 1991; 67: 773-776.
13. Ban M, Hasegawa T, Fujii S, et al. Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD. Diam Relat Mater 2003; 12: 47-56.
14. Voevodin AA, Fitz TA, Hu JJ, et al. Nanocomposite tribological coatings with ''chameleon'' surface adaptation. J Vac Sci Technol A 2002; 20: 1434.
15. Ferrari AC, Kleinsorge B, Morrison NA, et al. Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon. J Appl Phys 1999; 85: 7191-7197.
16. Li H, Xu T, Wang C, et al. Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films. Thin Solid Films 2006; 515: 2153-2160.
17. Wang Y-X, Ye Y-P, Li H-X, et al. Effect of annealing temperature on the structure and tribological property of a-C:H film. J Inorg Mater 2011; 26: 209-213.
18. Zhang W, Tanaka A, Wazumi K, et al. The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayer films. Diam Relat Mater 2004; 13: 2166-2169.
19. Wang Y, Ye Y, Li H, et al. Microstructure and tribological properties of the a-C:H films deposited by magnetron sputtering with CH 4/Ar mixture. Surf Coat Technol 2011; 205: 4577-4581.
20. Hopf C, Jacob W and von Keudell A. Ion-induced surface activation, chemical sputtering, and hydrogen release during plasma-assisted hydrocarbon film growth. J Appl Phys 2005; 97: 094904.
21. Zhao F, Li HX, Ji L, et al. Structural, mechanical and tribological characterizations of a-C:H: Si films prepared by a hybrid PECVD and sputtering technique. J Phys D: Appl Phys 2009; 42: 165407.
22. Liu X, Wang L and Xue Q. A novel carbon-based solid-liquid duplex lubricating coating with super-high tribological performance for space applications. Surf Coat Technol 2011; 205: 2738-2746.
23. Grill A and Patel V. Characterization of diamondlike carbon by infrared spectroscopy? Appl Phys Lett 1992; 60: 2089-2091.
24. Popescu B, Tagliaferro A, De Zan F, et al. Hydrogen incorporation and its structural effect on a-C:H films deposited by magnetron sputtering. J Non-Cryst Solids 2000; 266-269. Part 2: 803-807.
25. Veres M, Koós M and Pócsik I. IR study of the formation process of polymeric hydrogenated amorphous carbon film. Diam Relat Mater 2002; 11: 1110-1114.
26. Peng XL, Barber ZH and Clyne TW. Surface roughness of diamond-like carbon films prepared using various techniques. Surf Coat Technol 2001; 138: 23-32.
27. Lifshitz Y, Edrei R, Hoffman A, et al. Surface roughness evolution and growth mechanism of carbon films from hyperthermal species. Diam Relat Mater 2007; 16: 1771-1776.
28. Ji L, Li H, Zhao F, et al. Microstructure and mechanical properties of Mo/DLC nanocomposite films. Diam Relat Mater 2008; 17: 1949-1954.
29. Neuville S and Matthews A. A perspective on the optimisation of hard carbon and related coatings for engineering applications. Thin Solid Films 2007; 515: 6619-6653.
30. Xie ZW, Wang LP, Wang XF, et al. Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings. Appl Surf Sci 2011; 258: 1206-1211.
31. Cui WG, Lai QB, Zhang L, et al. Quantitative measurements of sp3 content in DLC films with Raman spectroscopy. Surf Coat Technol 2010; 205: 1995-1999.
32. Casiraghi C, Ferrari AC and Robertson J. Raman spectroscopy of hydrogenated amorphous carbons. Phys Rev B: Condens Matter 2005; 72: 085401.
33. Kalish R, Lifshitz Y, Nugent K, et al. Thermal stability and relaxation in diamond-like-carbon. A Raman study of films with different sp2/sp3 fractions (ta-C to a-C). Appl Phys Lett 1999; 74: 2936.
34. Wang WJ, Wang TM and Chen BL. Hydrogen release from diamond like carbon films due to thermal annealing in vacuum. Nucl Instrum Methods Phys Res B 1996; 117: 140-144.
35. Pei YT, Chechenin NG, Chernykh PN, et al. On the quantification of unbound hydrogen in diamond-like carbon-based thin films. Scripta Mater 2009; 61: 320-323.
36. Wang Y, Li H, Ji L, et al. The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering. J Phys D: Appl Phys 2010; 43: 505401.
37. Conway NMJ, Ferrari AC, Flewitt AJ, et al. Defect and disorder reduction by annealing in hydrogenated tetrahedral amorphous carbon. Diam Relat Mater 2000; 9: 765-770.
38. Li H, Xu T, Wang C, et al. Tribochemical effects on the friction and wear behaviors of a-C:H and a-C films in different environment. Tribol Int 2007; 40: 132-138.
39. Erdemir A. The role of hydrogen in tribological properties of diamond-like carbon. Surf Coat Technol 2001; 292-297.
40. Erdemir A and Donnet C. Tribology of diamond-like carbon films: recent progress and future prospects. J Phys D: Appl Phys 2006; 39: R311-R327.
41. Li KY, Zhou ZF, Bello I, et al. Study of tribological performance of ECR-CVD diamond-like carbon coatings on steel substrates. Wear 2005; 258: 1577-1588.
42. Wang Y, Wang L and Xue Q. Controlling wear failure of graphite-like carbon film in aqueous environment: two feasible approaches. Appl Surf Sci 2011; 257: 4370-4376.
43. Choi Y, Van Vliet KJ, Li J, et al. Size effects on the onset of plastic deformation during nanoindentation of thin films and patterned lines. J Appl Phys 2003; 94: 6050.
44. Wang P, Wang X, Xu T, et al. Comparing internal stress in diamond-like carbon films with different structure. Thin Solid Films 2007; 515: 6899-6903.
45. De Barros MI, Vandenbulcke L and Bléchet JJ. Influence of diamond characteristics on the tribological behaviour of metals against diamond-coated Ti-6 Al-4 V alloy. Wear 2001; 249: 67-77.
46. Sanchez-Lopez JC, Donnet C, Loubet JL, et al. Tribological and mechanical properties of diamondlike carbon prepared by high-density plasma. Diam Relat Mater 2001; 10: 1063-1069.