Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1063-1069

  Sanchez Lopez J C ^a   Donnet, C ^a   Loubet, J L ^a   Belin, M ^a   Grill, A ^b   Patel, V ^b   Jahnes, C ^b  

^a ECOLE CENTRALE DE LYON   (France)

^b IBM RESEARCH   (United States)

Author keywords

Diamond like carbon; High density plasma; Nanoidentation; Tribology

Indexed keywords

ELASTIC MODULI; FILM PREPARATION; HARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; VISCOPLASTICITY;

HIGH DENSITY PLASMAS; NANOINDENTATION;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; INORGANIC COATING; MECHANICAL PROPERTY; TRIBOLOGY;

EID: 0342902193     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00428-3     Document Type: Article

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