The influence of hydrogen ion bombardment on plasma-assisted hydrocarbon film growth

Diamond and Related Materials

Volumn 12, Issue 2, 2003, Pages 85-89

  Hopf, C ^a   von Keudell, A ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Amorphous hydrogenated carbon; Ellipsometry; Growth; Ion bombardment

Indexed keywords

CHEMICAL BONDS; FILM GROWTH; HYDROCARBONS; HYDROGEN; IONS;

ENERGY IONS;

ION BOMBARDMENT;

FILM;

EID: 0037308460     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00007-4     Document Type: Article

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