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Volumn 197, Issue 2-3, 2005, Pages 154-160
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The characterisation of e-beam evaporated and magnetron sputtered carbon films fabricated for atomic oxygen sensors
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Author keywords
Carbon; Sputtering; Surface characterisation; Surface structure; Vapour growth
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Indexed keywords
ALUMINA;
ANNEALING;
CARBON;
CHARACTERIZATION;
ELECTRIC CONDUCTIVITY;
ELECTRON BEAMS;
EVAPORATION;
GRAPHITIZATION;
HIGH TEMPERATURE EFFECTS;
MAGNETRON SPUTTERING;
OXYGEN SENSORS;
RAMAN SPECTROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATOMIC OXYGEN (AO);
CARBON COATINGS;
CARBON FILMS;
HIGH-TEMPERATURE ANNEALING;
COATINGS;
COATING;
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EID: 18844431913
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.06.044 Document Type: Article |
Times cited : (29)
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References (26)
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