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Volumn 197, Issue 2-3, 2005, Pages 154-160

The characterisation of e-beam evaporated and magnetron sputtered carbon films fabricated for atomic oxygen sensors

Author keywords

Carbon; Sputtering; Surface characterisation; Surface structure; Vapour growth

Indexed keywords

ALUMINA; ANNEALING; CARBON; CHARACTERIZATION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; EVAPORATION; GRAPHITIZATION; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; OXYGEN SENSORS; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 18844431913     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.06.044     Document Type: Article
Times cited : (29)

References (26)
  • 3
    • 1542303470 scopus 로고    scopus 로고
    • 2nd IEEE International Conference on Sensors
    • (October)
    • C. White A. Chambers G. Roberts 2nd IEEE International Conference on Sensors 2003 (October) IEEE 1287-1292
    • (2003) IEEE , pp. 1287-1292
    • White, C.1    Chambers, A.2    Roberts, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.