Effect of annealing temperature on the structure and tribological property of a-C:H film

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 26, Issue 2, 2011, Pages 209-213

  Wang, Yong Xia ^a,b   Ye, Yin Ping ^a   Li, Hong Xuan ^a   Ji, Li ^a   Chen, Jian Min ^a   Zhou, Hui Di ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

a C:H film; Annealing temperature; Structure; Tribological property

Indexed keywords

3D SURFACE; A-C:H FILMS; AMBIENT TEMPERATURES; ANNEALED FILMS; ANNEALING TEMPERATURE; ANNEALING TEMPERATURES; AS-DEPOSITED FILMS; BALL-ON-DISK; ELEVATED TEMPERATURE; FTIR; HYDROGENATED AMORPHOUS CARBON (A-C:H); LOW TEMPERATURES; RAMAN SPECTROSCOPE; STRUCTURE; STRUCTURE AND PROPERTIES; TRIBOLOGICAL PROPERTIES; TRIBOTESTER; X-RAY PHOTOELECTRON SPECTROSCOPE; XPS;

AMORPHOUS CARBON; AMORPHOUS FILMS; ANNEALING; CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; TRIBOLOGY;

STRUCTURAL PROPERTIES;

EID: 79953014819     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: 10.3724/SP.J.1077.2011.00209     Document Type: Article

References (20)

1. Robertson J. Diamond like amorphous carbon. Material Science and Engineering R, 2002, 37(4/5/6): 129-281.
2. Ji L, Li H X, Zhao F, et al. Effects of pulse bias duty cycle on fullerenelike nanostructure and mechanical properties of hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition method. Journal of Applied Physics, 2009, 105(10): 106113-1-3.
3. Michler J, Tobler M, Blank E. Thermal annealing behaviour of alloyed DLC films on steel: determination and modelling of mechanical properties. Diamond and Related Materials, 1999, 8(2-5): 510-516.
4. 2007, 27(5): 409-412.
5. Zhang Q, Yoon S F, Yang H, et al. Influence of oxygen on the thermal stability of amorphous hydrogenated carbon films. Journal of Applied Physics, 1998, 83(3): 1349-1353.
6. Mosaner P, Bonelli M, Miotello A. Pulsed laser deposition of diamond-like carbon films: reducing internal stress by thermal annealing. Applied Surface Science, 2003, 208-209: 561-565.
7. Jiu J T, Wang H, Cao C B, et al. The effect of annealing temperature on the structure of diamond-like carbon films by electrodeposition technique. Journal of Materials Science, 1999, 34(21): 5205-5209.
8. Wild Ch, Koidl P. Thermal gas effusion from hydrogenated amorphous carbon films. Applied Physics Letters, 1987, 51(19): 1506-1508.
9. Yang P, Chen J Y, Leng Y X, et al. Effect of annealing on structure and biomedical properties of amorphous hydrogenated carbon films. Surface and Coatings Technology, 2004, 186(1/2): 125-130.
10. Akkerman Z L, Efstathiadis H, Smith F W. Thermal stability of diamondlike carbon films. Journal of Applied Physics, 1996, 80(5): 3068-3075.
11. Nakazawa H, Kawabata T, Kudo Mashita M. Structural changes of diamond-like carbon films due to atomic hydrogen exposure during annealing. Applied Surface Science, 2007, 253(9): 4188-4196.
12. Li H X, Xu T, Wang Ch B, et al. Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films. Thin Solid Films, 2006, 515(4): 2153-2160.
13. Xu Helen G, Liang H, Woodford John B, et al. Temperature dependence of diamondlike carbon film tribological characteristics. Jurnal of the American Chemical Society, 2005, 88(11): 3110-3115.
14. Zhao F, Li H X, Ji L, et al. Structural, mechanical and tribological characterizations of a-C:H:Si films prepared by a hybrid PECVD and sputtering technique. Journal of Physics D: Applied Physics, 2009, 42(16): 165407-1-13.
15. Sugai H, Yoshida S, Toyoda H. Hydrogen retention and release dynamics of amorphous carbon films exposed to a hydrogen plasma. Applied Physics Letters, 1989, 54(15): 1412-1414.
16. Xia Li-Fang, et al. Journal of Inorganic Materials, 2002, 17(4): 777-781.
17. Tuinstra F, Koenig J L. Raman spectrum of graphite. Journal of Chemical Physics, 1970, 53(3): 1126-1130.
18. 3 bonding in diamond-like carbon? Diamond and Related Materials, 2002, 11(3-6): 994-999.
19. Wu X M, Ares Fang C S, Hill I, et al. X-ray photoelectron spectroscopy study of the atomic structure change of amorphous carbon films annealed in vacuum. Journal of Vacuum Science and Technology A, 1991, 9(6): 2986-2990.
20. 1994, 30(4): 42-46.