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Volumn 11, Issue 3-6, 2002, Pages 1110-1114
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IR study of the formation process of polymeric hydrogenated amorphous carbon film
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Author keywords
Amorphous hydrogenated carbon; Growth; IR; Spectroscopy
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Indexed keywords
BENZENE;
DEPOSITION;
ELECTRIC POTENTIAL;
HIGH PRESSURE EFFECTS;
INFRARED SPECTROSCOPY;
SIGNAL TO NOISE RATIO;
STRESS-FREE REGIONS;
CARBON;
BENZENE;
CARBON;
CARBON;
FILM;
MEASUREMENT METHOD;
FILM;
NORMAL DISTRIBUTION;
OPTICAL RESOLUTION;
SIGNAL NOISE RATIO;
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EID: 0036508407
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00011-0 Document Type: Article |
Times cited : (63)
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References (23)
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