Hydrogen incorporation and its structural effect on a-C:H films deposited by magnetron sputtering

Journal of Non-Crystalline Solids

Volumn 266-269 B, Issue , 2000, Pages 803-807

  Popescu, B ^a   Tagliaferro, A ^b   De Zan, F ^b   Davis, E A ^a  

^a UNIVERSITY OF LEICESTER   (United Kingdom)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006305024     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00818-2     Document Type: Article

References (11)

1. J. Gonzalez-Hernandez, B.S. Chao, D.A. Pawlik, J. Vac. Sci. Technol. A 7 (1989) 2332.
2. Y. Wang, H. Chen, R.W. Hoffman, J.C. Angus, J. Mater. Res. 5 (1990) 2378.
3. B. Bhushan, A.J. Kellock, N.-H. Cho, J.W. Anger, J. Mater. Res. 7 (1992) 404.
4. C. De Martino, F. Demichelis, A. Tagliaferro, Diamond and Related Mater. 4 (1995) 1210.
5. Y. Bounough, M.L. Thèye, A. Dehbi-Alaoui, A. Matthews, J.P. Stoquert, Phys. Rev. B 51 (1995) 9597.
6. S.R.P. Silva, J. Robertson Rusli, G.A.J. Amaratunga, Phil. Mag. B 74 (1996) 369.
7. B. Popescu, C. Verney, E.A. Davis, V. Paret, A. BrunetBruneau, these Proceedings, p. 778.
8. B. Dischler, A. Bubenzer, P. Koidl, Solid State Commun. 48 (1983) 105.
9. V. Paret, PhD thesis - Université Pierre et Marie Curie (Paris VI) France 1999.
10. W. Jacob, M. Unger, Appl. Phys. Lett. 68 (1996) 4 and references therein.
11. J.C. Angus, P. Koidl, S. Domitz, in: J. Mort, F. Jansen (Eds.), Plasma Deposited Thin Films, CRC, Boca Raton, FL, p. 89 and references therein.