The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 43, Issue 50, 2010, Pages

  Wang, Yongjun ^a,b   Li, Hongxuan ^a   Ji, Li ^a   Zhao, Fei ^a,b   Liu, Xiaohong ^a   Kong, Qinghua ^a,b   Wang, Yongxia ^a,b   Quan, Weilong ^a,b   Zhou, Huidi ^a   Chen, Jianmin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DUTY CYCLES; GRANULAR STRUCTURESS; HIGH LOAD; INTENSITY RATIO; INTERNAL STRESS; MICROSTRUCTURE AND PROPERTIES; ORDER OF MAGNITUDE; RAMAN ANALYSIS; ROUGH SURFACES; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING;

AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; DIAMOND LIKE CARBON FILMS; FILM PREPARATION; GRAPHITE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROSTRUCTURE; WEAR RESISTANCE;

CARBON FILMS;

EID: 78650162935     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/50/505401     Document Type: Article

References (41)

1. Robertson J 2002 Mater. Sci. Eng. R 37 129
2. Chen L and Hong F 2003 Appl. Phys. Lett. 82 3526
3. Neuville S and Matthews A 2007 Thin Solid Films 515 6619
4. Casiraghi C, Piazza F, Ferrari A, Grambole D and Robertson J 2005 Diamond Relat. Mater. 14 1098
5. Casiraghi C, Ferrari A and Robertson J 2005 Phys. Rev. B 72 085401
6. Robertson J 1992 Phys. Rev. Lett. 68 220
7. Yang S and Teer D 2000 Surf. Coat. Technol. 131 412
8. Singh S, Creatore M, Groenen R, Van Hege K and Van de Sanden M 2008 Appl. Phys. Lett. 92 221502
9. Lacerda R, Hammer P, Lepienski C, Alvarez F and Marques F 2001 J. Vac. Sci. Technol. A 19 971
10. Sjöström H, Stafström S, Boman M and Sundgren J 1995 Phys. Rev. Lett. 75 1336
11. Ji L, Li H, Zhao F, Chen J and Zhou H 2008 Diamond Relat. Mater. 17 1949
12. Zhang H, Endrino J and Anders A 2008 Appl. Surf. Sci. 255 2551
13. Robertson J 1992 Surf. Coat. Technol. 50 185
14. Zhao F, Li H, Ji L, Mo Y, Quan W, Zhou H and Chen J 2009 J. Phys. D: Appl. Phys. 42 165407
15. Ferrari A and Robertson J 2000 Phys. Rev. B 61 14095
16. Ferrari A and Robertson J 2001 Phys. Rev. B 64 075414
17. Buijnsters J, Gago R, Jiménez I, Camero M, Agulló-Rueda F and Gómez-Aleixandre C 2009 J. Appl. Phys. 105 093510
18. Zhang H and Komvopoulos K 2008 Rev. Sci. Instrum. 79 073905
19. Siegal M, Tallant D, Martinez-Miranda L, Barbour J, Simpson R and Overmyer D 2000 Phys. Rev. B 61 10451
20. Xu T, Yang S, Lu J, Xue Q, Li J, Guo W and Sun Y 2001 Diamond Relat. Mater. 10 1441
21. Liu A, Zhu J, Han J, Wu H and Jia Z 2007 Appl. Surf. Sci. 253 9124
22. Baptista D and Zawislak F 2004 Diamond Relat. Mater. 13 1791
23. Casiraghi C, Ferrari A and Robertson J 2005 Diamond Relat. Mater. 14 913
24. Casiraghi C, Robertson J and Ferrari A 2007 Mater. Today 10 44
25. Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G, Berthold J, Schultrich B and Jäger H 2007 Diamond Relat. Mater. 16 1771
26. Moseler M, Gumbsch P, Casiraghi C, Ferrari A and Robertson J 2005 Science 309 1545
27. Peng X, Barber Z and Clyne T 2001 Surf. Coat. Technol. 138 23
28. Casiraghi C, Ferrari A, Ohr R, Flewitt A, Chu D and Robertson J 2003 Phys. Rev. Lett. 91 226104
29. Lee K, Kim M, Cho S, Yong Eun K and Seong T 1997 Thin Solid Films 308-309 263
30. Kim T, Seung Lee C, Jin Lee Y, Lee K, Chae K and Hwan Oh K 2007 J. Appl. Phys. 101 023504
31. Sheeja D, Tay B, Lan S and Shi X 2001 Wear 249 433
32. Lacerda R and Marques F 1998 Appl. Phys. Lett. 73 617
33. Kumar S, Dixit P, Sarangi D and Bhattacharyya R 1999 J. Appl. Phys. 85 3866
34. Lejeune M, Benlahsen M and Bouzerar R 2004 Appl. Phys. Lett. 84 344
35. Yan X, Xu T, Wang X, Liu H and Yang S 2005 Surf. Coat. Technol. 190 206
36. Li H, Xu T, Chen J, Zhou H and Liu H 2004 Appl. Surf. Sci. 227 364
37. Wang X, Wang P, Yang S and Zhang J 2008 Wear 265 1708
38. Shum P, Zhou Z and Li K 2004 Wear 256 362
39. Zeng X, Zhang S, Ding X and Teer D 2002 Thin Solid Films 420-421 366
40. Zhang G, Yan P, Wang P, Chen Y and Zhang J 2007 J. Phys. D: Appl. Phys. 40 6748
41. Scharf T and Singer I 2009 Tribol. Lett. 36 43