Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas

AIChE Journal

Volumn 59, Issue 9, 2013, Pages 3214-3222

  Diomede, Paola ^a   Kim, Doosik ^b   Economou, Demetre J ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Energy distribution; Molecular; Plasma; Simulation

Indexed keywords

ELECTRON AND ION ENERGY DISTRIBUTION; ELECTRON ANGULAR DISTRIBUTION; ELECTRON ENERGY DISTRIBUTIONS; ENERGY DISTRIBUTIONS; MOLECULAR; PARTICLE-IN-CELL SIMULATIONS; SECONDARY ELECTRON EMISSIONS; SIMULATION;

DISSOCIATION; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY LEVELS; ION BEAMS; ION BOMBARDMENT; MONTE CARLO METHODS; PARTICLE BEAM DYNAMICS; PLASMA DENSITY; PLASMA THEORY; PLASMAS; SECONDARY EMISSION; SUBSTRATES;

ELECTRONS;

EID: 84881668521     PISSN: 00011541     EISSN: 15475905     Source Type: Journal    
DOI: 10.1002/aic.14053     Document Type: Article

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