Direct current sputtered aluminum-doped zinc oxide films for thin crystalline silicon heterojunction solar cell

Materials Chemistry and Physics

Volumn 141, Issue 2-3, 2013, Pages 744-751

  Qiu, Yu ^a   Hermawan, Henrico ^a   Gordon, Ivan ^a   Poortmans, Jef ^a  

^a IMEC   (Belgium)

Author keywords

Electrical properties; Optical properties; Oxides; Sputtering; Thin films

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; CRYSTALLINE SILICON HETEROJUNCTION SOLAR CELLS; DIRECT CURRENT MAGNETRON SPUTTERING; ELECTRICAL CONDUCTIVITY; FUNCTIONAL PROPERTIES; HETEROJUNCTION SOLAR CELLS; PROCESSING TEMPERATURE; SILICON HETEROJUNCTIONS;

ALUMINUM; AMORPHOUS FILMS; AMORPHOUS SILICON; ANNEALING; HETEROJUNCTIONS; OPTICAL FILMS; OPTICAL PROPERTIES; OXIDE FILMS; OXIDES; OXYGEN; SILICON; SOLAR CELLS; SPUTTERING; THIN FILMS; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 84881130956     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2013.06.002     Document Type: Article

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