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Materials Science in Semiconductor Processing

Volumn 14, Issue 1, 2011, Pages 23-27

Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target

(9) Shin, Beom Ki a Lee, Tae Il a Prakash Kar, Jyoti a Lee, Min Jung a Park, Kang Il a Ahn, Kyung Jun b Yeom, Keun Young b Cho, Joong Hwee c Myoung, Jae Min a

a Yonsei University (South Korea)

b Sungkyunkwan University (South Korea)

c SolarLight Ltd (South Korea)

Author keywords

Al doped ZnO; Cylindrical target; Deposition rate; Pulsed dc magnetron sputtering; Structural and electrical properties

Indexed keywords

AL-DOPED ZNO; AR ATOM; AZO FILMS; COST TRANSPARENT; CYLINDRICAL TARGET; DEPOSITION POWER; DIRECT-CURRENT MAGNETRON SPUTTERING; ELECTRONIC DEVICE; ENERGETIC PARTICLES; HIGH-QUALITY FILMS; OXYGEN IONS; PULSED DC MAGNETRON SPUTTERING; SPUTTERING POWER; STOICHIOMETRIC RATIO; STRUCTURAL AND ELECTRICAL PROPERTIES; ZNO;

ALUMINUM; CYLINDERS (SHAPES); DC POWER TRANSMISSION; DEPOSITION RATES; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNETRON SPUTTERING; OPTICAL FILMS; OXYGEN; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 79952617889 PISSN: 13698001 EISSN: None Source Type: Journal
DOI: 10.1016/j.mssp.2010.12.013 Document Type: Article

Times cited : (17)

References (22)

1
- 34548770669
- T. Minami, T. Miyata, and Y. Ohtani Phys Status Solidi 204 2007 3145
- (2007) Phys Status Solidi , vol.204 , pp. 3145
- Minami, T.¹ Miyata, T.² Ohtani, Y.³

2
- 12244269267
- H. Kim, A. Piqu, J.S. Horwitz, H. Murata, Z.H. Kafafi, and C.M. Gilmore Thin Solid Films 798 2000 377
- (2000) Thin Solid Films , vol.798 , pp. 377
- Kim, H.¹ Piqu, A.² Horwitz, J.S.³ Murata, H.⁴ Kafafi, Z.H.⁵ Gilmore, C.M.⁶

3
- 79952619042
- M. Terheggen, H. Heinrich, G. Kostorz, F.-J. Haug, H. Zogg, and A.N. Tiwari Thin Solid Films 212 2002 403
- (2002) Thin Solid Films , vol.212 , pp. 403
- Terheggen, M.¹ Heinrich, H.² Kostorz, G.³ Haug, F.-J.⁴ Zogg, H.⁵ Tiwari, A.N.⁶

4
- 36549102198
- S. Major, S. Kumar, M. Bhatnagar, and K.L. Chopra Appl Phys Lett 49 1986 394
- (1986) Appl Phys Lett , vol.49 , pp. 394
- Major, S.¹ Kumar, S.² Bhatnagar, M.³ Chopra, K.L.⁴

5
- 0021428475
- T. Minami, H. Nanto, and S. Takada Jpn J Appl Phys 23 1984 L280
- (1984) Jpn J Appl Phys , vol.23 , pp. 280
- Minami, T.¹ Nanto, H.² Takada, S.³

6
- 29344450648
- D.G. Lim, D.H. Kim, J.K. Kim, O. Kwon, K.J. Yang, and K.I. Park Superlattices Microstructures 39 2006 107
- (2006) Superlattices Microstructures , vol.39 , pp. 107
- Lim, D.G.¹ Kim, D.H.² Kim, J.K.³ Kwon, O.⁴ Yang, K.J.⁵ Park, K.I.⁶

7
- 79952621663
- J. O'Brien, and P.J. Kelly Surf Coat Technol 621 2001 142
- (2001) Surf Coat Technol , vol.621 , pp. 142
- O'Brien, J.¹ Kelly, P.J.²

8
- 65449136277
- T. Welzel, R. Kleinhempel, T. Dunger, and F. Richter Plasma Process Polym 6 2009 S331
- (2009) Plasma Process Polym , vol.6 , pp. 331
- Welzel, T.¹ Kleinhempel, R.² Dunger, T.³ Richter, F.⁴

9
- 0035269769
- M. Okoshi, K. Higashikawa, and M. Hanabusa Jpn J Appl Phys 40 2001 1287
- (2001) Jpn J Appl Phys , vol.40 , pp. 1287
- Okoshi, M.¹ Higashikawa, K.² Hanabusa, M.³

10
- 0141525086
- B. Szyszka, V. Sittinger, X. Jiang, R.J. Hong, W. Werner, and A. Pflug Thin Solid Films 442 2003 179
- (2003) Thin Solid Films , vol.442 , pp. 179
- Szyszka, B.¹ Sittinger, V.² Jiang, X.³ Hong, R.J.⁴ Werner, W.⁵ Pflug, A.⁶

11
- 0035311985
- M. Chen, Z.L. Pei, C. Sun, L.S. Wen, and X. Wang Mater Lett 48 2001 194
- (2001) Mater Lett , vol.48 , pp. 194
- Chen, M.¹ Pei, Z.L.² Sun, C.³ Wen, L.S.⁴ Wang, X.⁵

12
- 0037009721
- T. Minami, Y. Minamino, S. Ida, and T. Miyata Thin Solid Films 416 2002 92
- (2002) Thin Solid Films , vol.416 , pp. 92
- Minami, T.¹ Minamino, Y.² Ida, S.³ Miyata, T.⁴

13
- 56949089567
- R.E. Marotti, C.D. Bojorge, E. Broitman, H.R. Cnepa, J.A. Badn, and E.A. Dalchiel Thin Solid Films 517 2008 1077
- (2008) Thin Solid Films , vol.517 , pp. 1077
- Marotti, R.E.¹ Bojorge, C.D.² Broitman, E.³ Cnepa, H.R.⁴ Badn, J.A.⁵ Dalchiel, E.A.⁶

14
- 0033170239
- K. Suzuki Thin Solid Films 351 1999 8
- (1999) Thin Solid Films , vol.351 , pp. 8
- Suzuki, K.¹

15
- 0000139470
- R. Cebulla, R. Werndt, and K. Ellmer J Appl Phys 83 1998 1087
- (1998) J Appl Phys , vol.83 , pp. 1087
- Cebulla, R.¹ Werndt, R.² Ellmer, K.³

16
- 36049036267
- P.J. Kelly, G. West, Y.N. Kok, J.W. Bradley, I. Swindells, and G.C.B. Clarke Surf Coat Technol 202 2007 952
- (2007) Surf Coat Technol , vol.202 , pp. 952
- Kelly, P.J.¹ West, G.² Kok, Y.N.³ Bradley, J.W.⁴ Swindells, I.⁵ Clarke, G.C.B.⁶

17
- 0003427458
- 2nd ed Addison-Wesley Reading MA
- B.D. Cullity Elements of X-ray diffraction 2nd ed 1978 Addison-Wesley Reading MA p. 127
- (1978) Elements of X-ray Diffraction
- Cullity, B.D.¹

18
- 0020087557
- S. Maniv, W.D. Westwood, and E. Colombini J Vac Sci Technol 20 1982 162
- (1982) J Vac Sci Technol , vol.20 , pp. 162
- Maniv, S.¹ Westwood, W.D.² Colombini, E.³

19
- 79952627565
- JCPDS Card no. 36-1451
- JCPDS Card no. 36-1451.

20
- 0030194256
- M.N. Islam, T.B. Ghosh, K.L. Chopra, and H.N. Acharya Thin Solid Films 280 1996 20
- (1996) Thin Solid Films , vol.280 , pp. 20
- Islam, M.N.¹ Ghosh, T.B.² Chopra, K.L.³ Acharya, H.N.⁴

21
- 0033726952
- M. Chen, X. Wang, Y.H. Yu, Z.L. Pei, X.D. Bai, and C. Sun Appl Surf Sci 158 2000 134
- (2000) Appl Surf Sci , vol.158 , pp. 134
- Chen, M.¹ Wang, X.² Yu, Y.H.³ Pei, Z.L.⁴ Bai, X.D.⁵ Sun, C.⁶

22
- 1842587440
- S.H.K. Park, and Y.E. Lee J Mater Sci 39 2004 2195
- (2004) J Mater Sci , vol.39 , pp. 2195
- Park, S.H.K.¹ Lee, Y.E.²

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