Structural and functional properties of Al:ZnO thin films grown by Pulsed Laser Deposition at room temperature

Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4707-4711

  Gondoni, P ^a   Ghidelli, M ^a   Di Fonzo, F ^b   Russo, V ^a   Bruno, P ^b   Marti Rujas J ^b   Bottani, C E ^a,b   Li Bassi, A ^a,b   Casari, C S ^a,b  

^a POLITECNICO DI MILANO   (Italy)

^b ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

Aluminum doped zinc oxide (AZO); Electrical conductivity; Optical properties; Pulsed Laser Deposition (PLD); Transparent conducting oxide (TCO)

Indexed keywords

AL-DOPED ZNO; ALUMINUM-DOPED ZINC OXIDE; AZO THIN FILMS; DEFECT FORMATION; DEPOSITION PRESSURES; ELECTRICAL CONDUCTIVITY; FILM PROPERTIES; FUNCTIONAL PROPERTIES; INDIUM TIN OXIDE; INDIUM-FREE; MEAN VALUES; OPTICAL TRANSPARENCY; OXYGEN ATMOSPHERE; ROOM TEMPERATURE; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE RANGE;

ALUMINUM; ELECTRIC CONDUCTIVITY; INDIUM; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; TIN; TIN OXIDES; TRANSPARENCY; X RAY DIFFRACTION; ZINC OXIDE;

PULSED LASER DEPOSITION;

EID: 84860295155     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.072     Document Type: Conference Paper

References (29)

1. G. Thomas Nature 389 1997 907
2. T. Minami Semicond. Sci. Technol. 20 2005 S35
3. C.G. Granqvist Sol. Energy Mater. Sol. Cells 91 2007 1529
4. E. Fortunato, D. Ginley, H. Hosono, and D.C. Paine MRS Bull. 32 2007 242
5. B.G. Lewis, and D.C. Paine MRS Bull. 25 2000 22
6. U. Özgür, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Doan, and V. Avrutin J. Appl. Phys. 98 2005 1
7. J.-i. Nomoto, M. Konagai, K. Okada, T. Ito, T. Miyata, and T. Minami Thin Solid Films 518 2010 2937
8. T. Minami Thin Solid Films 516 2008 1314
9. K. Ellmer J. Phys. D: Appl. Phys. 34 2001 3097
10. D. Chrisey, and G. Hubler Pulsed Laser Deposition of Thin Films 1994 Wiley-Interscience publication. J. Wiley
11. F. Di Fonzo, C.S. Casari, V. Russo, M.F. Brunella, A. Li Bassi, and C.E. Bottani Nanotechnology 20 2009 015604
12. A. Bailini, F. Di Fonzo, M. Fusi, C.S. Casari, A. Li Bassi, V. Russo, A. Baserga, and C.E. Bottani Appl. Surf. Sci. 253 2007 8130
13. F. Di Fonzo, D. Tonini, A. Li Bassi, C.S. Casari, M. Beghi, C.E. Bottani, D. Gastaldi, P. Vena, and R. Contro Appl. Phys. A 93 2008 765
14. G.J. Exarhos, and X.-D. Zhou Thin Solid Films 515 2007 7025
15. T. Minami Thin Solid Films 517 2008 1474
16. S.-H. Chen, C.-F. Yu, Y.-S. Lin, W.-J. Xie, T.-W. Hsu, and D. Tsai J. Appl. Phys. 104 2008 114314
17. H. Agura, A. Suzuki, T. Matsushita, T. Aoki, and M. Okuda Thin Solid Films 445 2003 263
18. S. Henley, M. Ashfold, and D. Cherns Surf. Coat. Technol. 177 2004 271
19. A.V. Singh, and R.M. Mehra J. Appl. Phys. 90 2001 5661
20. T. Scharf, and H.U. Krebs Appl. Phys. A 75 2002 551
21. S. Amoruso, B. Toftmann, and J. Schou Appl. Surf. Sci. 248 2005 323
22. D. Geohegan, A. Puretzky, G. Duscher, and S. Pennycook Appl. Phys. Lett. 72 1998 2987
23. C. Kittel Introduction to Solid State Physics 5th ed. edition 1976 Wiley New York
24. B. Dong, H. Hu, G. Fang, X. Zhao, D. Zheng, and Y. Sun J. Appl. Phys. 103 2008 73711
25. C. Guillén, and J. Herrero Vacuum 84 2010 924
26. A. Anders, S.H.N. Lim, K. Man, J. Andersson, J. Rosén, M. Mcfarland, and J. Brown Thin Solid Films 518 2010 3313
27. O. Tuna, Y. Selamet, G. Aygun, and L. Ozyuzer J. Phys. D: Appl. Phys. 43 2010 55402
28. T. Tsuji, and M. Hirohashi Appl. Surf. Sci. 157 2000 47
29. T.J. Coutts, and D.L. Young MRS Bull. 25 2000 58