Effect of substrate temperature on the properties of Al-doped ZnO films by RF magnetron sputtering

Materials Science Forum

Volumn 663-665, Issue , 2011, Pages 1293-1297

  Wu, Yue Bo ^a   Lei, Sheng ^a   Wang, Zhe ^a   Zhao, Ru Hai ^a   Huang, Lei ^a   Li, Hui ^a  

^a ANHUI JIANZHU UNIVERSITY   (China)

Author keywords

AZA film; Resistivity; Substrate temperature; Transmittance

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRIC CONDUCTIVITY; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; OPTOELECTRONIC DEVICES; SEMICONDUCTOR DOPING; TEMPERATURE; ZINC OXIDE;

C-AXIS ORIENTATIONS; DIFFERENT SUBSTRATES; HIGH TRANSMITTANCE; PROPERTIES OF AL; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TRANSMITTANCE; ULTRAVIOLET ABSORPTION;

SUBSTRATES;

EID: 78649940946     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.663-665.1293     Document Type: Conference Paper

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