The correlation between preferred orientation and performance of ITO thin films

Journal of Materials Science: Materials in Electronics

Volumn 18, Issue SUPPL. 1, 2007, Pages 411-414

  Chen, Yao ^a   Zhou, Yuqin ^a,b   Zhang, Qunfang ^a   Zhu, Meifang ^a   Liu, Fengzhen ^a  

^a UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN ORIENTATION; REACTIVE THERMAL EVAPORATION; TIN-DOPED INDIUM OXIDE; TRANSMISSIVITY;

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; OPTICAL CORRELATION; OPTICAL PROPERTIES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

THIN FILMS;

EID: 34547575894     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9231-7     Document Type: Conference Paper

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