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Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1466-1470
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Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature
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Author keywords
II VI Semiconductors; Indium tin oxide and other transparent conductors; Photovoltaics
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Indexed keywords
CRYSTALLINE MATERIALS;
DEPOSITION;
MAGNETRON SPUTTERING;
SEMICONDUCTOR MATERIALS;
X RAY DIFFRACTION;
II-VI SEMICONDUCTORS;
INDIUM TIN OXIDE;
PHOTOVOLTAICS;
TRANSPARENT CONDUCTORS;
THIN FILMS;
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EID: 33745444518
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.11.088 Document Type: Article |
Times cited : (162)
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References (16)
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