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Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1466-1470

Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature

Author keywords

II VI Semiconductors; Indium tin oxide and other transparent conductors; Photovoltaics

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; MAGNETRON SPUTTERING; SEMICONDUCTOR MATERIALS; X RAY DIFFRACTION;

EID: 33745444518     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.11.088     Document Type: Article
Times cited : (162)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.