메뉴 건너뛰기




Volumn 158, Issue 8, 2011, Pages

Low pressure chemical vapor deposition of aluminum-doped zinc oxide for transparent conducting electrodes

Author keywords

[No Author keywords available]

Indexed keywords

AL CONTENT; AL-DOPING; ALUMINUM-DOPED ZINC OXIDE; AZO FILMS; CARRIER ELECTRONS; COMPARATIVE STUDIES; COMPREHENSIVE STUDIES; EFFECTIVE OXIDE CHARGE; GATE ELECTRODES; HIGH WORK FUNCTION; INTERFACE STATE; METAL OXIDE SEMICONDUCTOR; TRANSPARENT CONDUCTING ELECTRODES; VISIBLE RANGE;

EID: 80051740548     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3599055     Document Type: Article
Times cited : (47)

References (34)
  • 1
    • 0038136910 scopus 로고    scopus 로고
    • Transparent electronics
    • DOI 10.1126/science.1085276
    • J. F. Wager, Science, 300, 1245 (2003). 10.1126/science.1085276 (Pubitemid 36618226)
    • (2003) Science , vol.300 , Issue.5623 , pp. 1245-1246
    • Wager, J.F.1
  • 4
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London), 432, 488 (2004). 10.1038/nature03090 (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 6
    • 38949138104 scopus 로고    scopus 로고
    • A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film
    • DOI 10.1016/j.apsusc.2007.10.012, PII S0169433207014468
    • Y. C. Lin, Y. C. Jian, and J. H. Jiang, Appl. Surf. Sci., 254, 2671 (2008). 10.1016/j.apsusc.2007.10.012 (Pubitemid 351222614)
    • (2008) Applied Surface Science , vol.254 , Issue.9 , pp. 2671-2677
    • Lin, Y.C.1    Jian, Y.C.2    Jiang, J.H.3
  • 7
    • 65149091515 scopus 로고    scopus 로고
    • 10.1016/j.tsf.2009.01.146
    • D.-J. Yun and S.-W. Rhee, Thin Solid Films, 517, 4644 (2009). 10.1016/j.tsf.2009.01.146
    • (2009) Thin Solid Films , vol.517 , pp. 4644
    • Yun, D.-J.1    Rhee, S.-W.2
  • 8
    • 33751237675 scopus 로고    scopus 로고
    • High work function of Al-doped zinc-oxide thin films as transparent conductive anodes in organic light-emitting devices
    • DOI 10.1016/j.apsusc.2006.03.032, PII S0169433206002819
    • T. Kim, D. Choo, Y. No, W. Choi, and E. Choi, Appl. Surf. Sci., 253, 1917 (2006). 10.1016/j.apsusc.2006.03.032 (Pubitemid 44791556)
    • (2006) Applied Surface Science , vol.253 , Issue.4 , pp. 1917-1920
    • Kim, T.W.1    Choo, D.C.2    No, Y.S.3    Choi, W.K.4    Choi, E.H.5
  • 10
    • 19244385168 scopus 로고    scopus 로고
    • Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices
    • DOI 10.1016/S0040-6090(00)01290-6
    • H. Kim, A. Piqué, J. S. Horwitz, H. Murata, Z. H. Kafafi, C. M. Gilmore, and D. B. Chrisey, Thin Solid Films, 377-378, 798 (2000). 10.1016/S0040-6090(00)01290-6 (Pubitemid 32035312)
    • (2000) Thin Solid Films , vol.377-378 , pp. 798-802
    • Kim, H.1    Pique, A.2    Horwitz, J.S.3    Murata, H.4    Kafafi, Z.H.5    Gilmore, C.M.6    Chrisey, D.B.7
  • 14
    • 34047266185 scopus 로고    scopus 로고
    • Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films
    • DOI 10.1063/1.2719158
    • J. Steinhauser, S. Fay, N. Oliveira, E. Vallat-Sauvain, and C. Ballif, Appl. Phys. Lett., 90, 142107 (2007). 10.1063/1.2719158 (Pubitemid 46550096)
    • (2007) Applied Physics Letters , vol.90 , Issue.14 , pp. 142107
    • Steinhauser, J.1    Fay, S.2    Oliveira, N.3    Vallat-Sauvain, E.4    Ballif, C.5
  • 15
  • 18
    • 34248399209 scopus 로고    scopus 로고
    • Amorphous gallium indium zinc oxide thin film transistors: Sensitive to oxygen molecules
    • DOI 10.1063/1.2723543
    • D. Kang, H. Lim, C. Kim, I. Song, J. Park, Y. Park, and J. Chung, Appl. Phys. Lett., 90, 192101 (2007). 10.1063/1.2723543 (Pubitemid 46738090)
    • (2007) Applied Physics Letters , vol.90 , Issue.19 , pp. 192101
    • Kang, D.1    Lim, H.2    Kim, C.3    Song, I.4    Park, J.5    Park, Y.6    Chung, J.7
  • 26
    • 33646202250 scopus 로고
    • 10.1103/PhysRev.93.632
    • E. Burstein, Phys. Rev., 93, 632 (1954). 10.1103/PhysRev.93.632
    • (1954) Phys. Rev. , vol.93 , pp. 632
    • Burstein, E.1
  • 29
    • 19244385168 scopus 로고    scopus 로고
    • Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices
    • DOI 10.1016/S0040-6090(00)01290-6
    • H. Kim, A. Pique, J. Horwitz, H. Murata, Z. Kafafi, C. Gilmore, and D. Chrisey, Thin Solid Films, 377, 798 (2000). 10.1016/S0040-6090(00)01290-6 (Pubitemid 32035312)
    • (2000) Thin Solid Films , vol.377-378 , pp. 798-802
    • Kim, H.1    Pique, A.2    Horwitz, J.S.3    Murata, H.4    Kafafi, Z.H.5    Gilmore, C.M.6    Chrisey, D.B.7
  • 30
    • 0037450228 scopus 로고    scopus 로고
    • 10.1002/adma.200390065
    • D. Cahen and A. Kahn, Adv. Mater., 15, 271 (2003). 10.1002/adma.200390065
    • (2003) Adv. Mater. , vol.15 , pp. 271
    • Cahen, D.1    Kahn, A.2
  • 33
    • 0021371783 scopus 로고
    • Effects of kev electron irradiation on optical generation of hole traps in thermal oxide on silicon
    • DOI 10.1063/1.333181
    • J. J. Tzou, J. Y.-C. Sun, and C.-T. Sah, J. Appl. Phys., 55, 846 (1984). 10.1063/1.333181 (Pubitemid 14526631)
    • (1984) Journal of Applied Physics , vol.55 , Issue.4 , pp. 846-851
    • Tzou, J.J.1    Sun, J.Y.-C.2    Sah, C.-T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.