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Vacuum

Volumn 99, Issue , 2014, Pages 233-241

Reactive magnetron sputtering deposition and characterization of niobium carbide films

(7) Zhang, Kan a Wen, M a Cheng, G a Li, X a Meng, Q N a Lian, J S a Zheng, W T a

a JILIN UNIVERSITY (China)

Author keywords

Friction and wear; Hardness; Microstructure; NbCx thin films; Sputtering

Indexed keywords

AMORPHOUS HYDROCARBONS; FRICTION AND WEAR; FRICTION COEFFICIENTS; NANO-COMPOSITE STRUCTURE; REACTIVE MAGNETRON SPUTTERING; REACTIVE MAGNETRON SPUTTERING DEPOSITION; SI (100) SUBSTRATE; TRIBOLOGICAL BEHAVIORS;

AMORPHOUS CARBON; CARBIDES; CARBON FILMS; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOCOMPOSITE FILMS; NANOCOMPOSITES; NIOBIUM; SPUTTERING; THIN FILMS;

AMORPHOUS FILMS;

EID: 84880337497 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2013.06.012 Document Type: Article

Times cited : (78)

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