Characterization of NbC coatings deposited by magnetron sputtering method

Surface and Coatings Technology

Volumn 204, Issue 12-13, 2010, Pages 2002-2005

  Zoita, C N ^a   Braic, L ^a   Kiss, A ^a   Braic, M ^a  

^a NATIONAL INSTITUTE FOR OPTOELECTRONICS   (Romania)

Author keywords

Magnetron sputtering; Niobium carbide coatings; Optical properties; Structure

Indexed keywords

AFM; CARBON CONTENT; CRYSTALLOGRAPHIC STRUCTURE; DEPOSITION ATMOSPHERE; DEPOSITION TEMPERATURES; DIFFERENT SUBSTRATES; FLOW RATIOS; HEXAGONAL STRUCTURES; MAGNETRON SPUTTERING METHOD; MEAN-GRAIN SIZE; NIOBIUM CARBIDE; NIOBIUM CARBIDE COATINGS; OPTICAL REFLECTIVITY; REACTIVE ATMOSPHERES; REACTIVE MAGNETRON SPUTTERING METHOD; REFLECTIVITY VALUES; RELATIVE ABUNDANCE; SI SUBSTRATES; SUBSTRATE BIAS; SUBSTRATE TEMPERATURE; XRD;

CARBIDES; CARBON FILMS; COATINGS; DEPOSITION; MAGNETRON SPUTTERING; MAGNETRONS; NIOBIUM; OPTICAL PROPERTIES; REFLECTION;

SUBSTRATES;

EID: 76349094931     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.08.050     Document Type: Article

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