Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique

Applied Surface Science

Volumn 258, Issue 12, 2012, Pages 5025-5030

  Cui, Jinfeng ^a   Qiang, Li ^a,b   Zhang, Bin ^b   Ling, Xiao ^a,b   Yang, Tao ^a,b   Zhang, Junyan ^b  

^a LANZHOU UNIVERSITY OF TECHNOLOGY   (China)

^b LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Diamond like carbon film; Different concentration Ti doping; Low concentration Ti doping; Mechanical properties; Tribological performance

Indexed keywords

CARBIDES; CARBON FILMS; COMPOSITE FILMS; FLOW OF GASES; FRICTION; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; SEMICONDUCTOR DOPING; TITANIUM CARBIDE; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC CONCENTRATION; CONCENTRATION ROSE; GAS-FLOW RATIO; LOW FRICTION COEFFICIENTS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; STONEY EQUATION; TI DOPING; TRIBOLOGICAL PERFORMANCE;

DIAMOND LIKE CARBON FILMS;

EID: 84862829867     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.01.072     Document Type: Article

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