Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5419-5423

  Wang, Huili ^a   Zhang, Sam ^a   Li, Yibin ^a   Sun, Deen ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Magnetron sputtering; Mechanical properties; Substrate bias; TiC

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOCRYSTALLINE MATERIALS; NANOINDENTATION; SPUTTER DEPOSITION; TITANIUM CARBIDE; TOUGHNESS; X RAY DIFFRACTION ANALYSIS;

FIELD EMISSION SCANNING ELECTRON MICROSCOPY; NANOINDENTATION HARDNESS; SCANNING MICROSCRATCH; SUBSTRATE BIAS;

THIN FILMS;

EID: 43949088144     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.022     Document Type: Article

References (21)

1. Pierson H.O. Handbook of Refractory Carbides and Nitrides (1996), William Andrew Publishing/Noyes
2. Stegarescu M., and Hoyer W. J. Optoelectron. Adv. Mater. 6/2 (2004) 493
3. Georgiev G., Feschiev N., Popov D., and Uzunov Z. Vacuum 36/10 (1986) 595
4. Sundgren J.E., Johansson B.O., and Karlsson S.E. Thin Solid Films 105/4 (1983) 353
5. Sundgren J.E., Johansson B.O., Karlsson S.E., and Hentzell H.T.G. Thin Solid Films 105/4 (1983) 367
6. Sundgren J.E., Johansson B.O., Hentzell H.T.G., and Karlsson S.E. Thin Solid Films 105/4 (1983) 385
7. Eizenberg M., and Murarka S.P. J. Appl. Phys. 54 (1983) 3190
8. Voevodin A.A., Capano M.A., Safriet A.J., Donley M.S., and Zabinski J.S. Appl. Phys. Lett. 69 (1996) 188
9. Zhang S., Sun D., Fu Y., and Du H. Surf. Coat. Tech. 198 (2005) 2
10. Zhang S., Bui X.L., and Fu Y. Surf. Coat. Technol. 167 (2003) 137
11. Kaelble E.F. Handbook of X-rays, for Diffraction, Emission, Absorption, and Microscopy (1967), McGraw-Hill, New York
12. Lawn B.R., Evans A.G., and Marshall D.B. J. Am. Ceram. Soc. 63/9-10 (1980) 574
13. Zhang S., Fu Y., Bui X.L., and Du H. Int. J. Nanosci. 3/6 (2004) 1
14. McKenzie D.R., and Bilek M.M.M. J. Appl. Phys. 86 (1999) 230
15. Thornton J.A. Annu. Rev. Mater. Sci. 7 (1977) 239
16. Ding X.-z., Tay B.K., Tan H.S., Lau S.P., Cheung W.Y., and Wong S.P. Surf. Coat. Technol. 138/2-3 (2001) 301
17. Benegra M., Lamas D.G., Fernandez de Rapp M.E., Mingolo N., Kunrath A.O., and Souza R.M. Thin Solid Films 494/1-2 (2006) 146
18. Nomura N., Yoshimi K., Konno T., and Hanada S. J. Mater. Sci. Lett. 19/21 (2000) 1879
19. Pei Y.T., Galvan D., De Hosson J.T.M., and Strondl C. J. Eur. Ceram. Soc. 26/4-5 (2006) 565
20. Pei Y.T., Galvan D., and De Hosson J.T.M. Acta Mater. 53/17 (2005) 4505
21. Musil J., Kadlec S., Vyskocil J., and Valvoda V. Thin Solid Films 167/1-2 (1988) 107