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Volumn 239, Issue 3-4, 2005, Pages 302-310

Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

(6) Gulbinski W a Mathur, S b Shen, H b Suszko, T a Gilewicz, A a Warcholinski B a

a KOSZALIN UNIVERSITY OF TECHNOLOGY (Poland)

b INM LEIBNIZ INSTITUTE FOR NEW MATERIALS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; CRYSTALLIZATION; DEPOSITION; HARDNESS; MAGNETRON SPUTTERING; MATRIX ALGEBRA; MICROSTRUCTURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITE FILMS; NANOCOMPOSITE COATINGS; OPTICAL EMISSION SPECTROSCOPY; TRIBOLOGICAL PROPERTIES;

TITANIUM CARBIDE;

EID: 10844284788 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.05.278 Document Type: Article

Times cited : (146)

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