Evaluating focused ion beam induced damage in soft materials

Micron

Volumn 50, Issue , 2013, Pages 51-56

  Bailey, Russell J ^a   Geurts, Remco ^b   Stokes, Debbie J ^b   de Jong, Frank ^b   Barber, Asa H ^a  

^a QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

^b Thermo Fisher Scientific   (United States)

Author keywords

AFM; Damage; FIB; Phase contrast; Polymer

Indexed keywords

AFM; DAMAGE; ENERGY DISPERSIVE SPECTROSCOPIES (EDS); EXPERIMENTAL OBSERVATION; FIB; FOCUSED ION BEAM MICROSCOPY; PHASE CONTRASTS; PREPARATION TECHNIQUE;

COMPUTER SIMULATION; ENERGY DISPERSIVE SPECTROSCOPY; FOCUSED ION BEAMS; MATERIALS HANDLING EQUIPMENT; POLYCARBONATES; POLYMERS;

SURFACES;

EID: 84880132178     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2013.04.005     Document Type: Article

References (32)

1. Abdel-Salam M.H., Nouh S.A., Radwan Y.E., Fouad S.S. Structure and mechanical investigation of the effect of proton irradiation in Makrofol DE 7-2 polycarbonate. Materials Chemistry and Physics 2011, 127:305-309.
2. Behrend O.P., Oulevey F., Gourdon D., Dupas E., Kulik A.J., Gremaud G., Burnham N.A. Intermittent contact: tapping or hammering?. Applied Physics A: Materials 1998, 66:S219-S221.
3. Behrend O.P., Odoni L., Loubet J.L., Burnham N.A. Phase imaging: deep or superficial?. Applied Physics Letters 1999, 75:2551-2553.
4. Brezna W., Wanzenbock H., Lugstein A., Bertagnolli E., Gornik E., Smoliner J. Focussed ion beam induced damage in silicon studied by scanning capacitance microscopy. Semiconductor Science and Technology 2003, 18:195-198.
5. Brezna W., Wanzenbock H., Lugstein A., Bertagnolli E., Gornik E., Smoliner J. Scanning capacitance microscopy investigations of focused ion beam damage in silicon. Physica E 2003, 19:178-182.
6. Briscoe B.J., Fiori L., Pelillo E. Nano-indentation of polymeric surfaces. Journal of Physics D: Applied Physics 1998, 31:2395-2405.
7. Brostow W., Gorman B.P., Olea-Mejia O. Focused ion beam milling and scanning electron microscopy characterization of polymer plus metal hybrids. Materials Letters 2007, 61:1333-1336.
8. Cleveland J.P., Anczykowski B., Schmid A.E., Elings V.B. Energy dissipation in tapping-mode atomic force microscopy. Applied Physics Letters 1998, 72:2613-2615.
9. D'Amato M.J., Marcus M.S., Eriksson M.A., Carpick R.W. Phase imaging and the lever-sample tilt angle in dynamic atomic force microscopy. Applied Physics Letters 2004, 85:4738-4740.
10. Drobne D., Milani M., Leser V., Tatti F. Surface damage induced by FIB milling and imaging of biological samples is controllable. Microscopy Research and Technique 2007, 70:895-903.
11. Garcia R., Tamayo J., Calleja M., Garcia F. Phase contrast in tapping-mode scanning force microscopy. Applied Physics A: Materials 1998, 66:S309-S312.
12. Giannuzzi L.A., Stevie F.A. A review of focused ion beam milling techniques for TEM specimen preparation. Micron 1999, 30:197-204.
13. Giannuzzi L.A., Stevie F.A. Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice 2004, Springer, New York.
14. Gowa T., Takahashi T., Oka T., Murakami T., Oshima A., Tagawa S., Washio M. Ion beam irradiation effects on resist materials. Journal of Photopolymer Science and Technology 2010, 23:399-404.
15. Hayles M.F., Stokes D.J., Phifer D., Findlay K.C. A technique for improved focused ion beam milling of cryo-prepared life science specimens. Journal of Microscopy - Oxford 2007, 226:263-269.
16. Heymann J.A.W., Hayles M., Gestmann I., Giannuzzi L.A., Lich B., Subramaniam S. Site-specific 3D imaging of cells and tissues with a dual beam microscope. Journal of Structural Biology 2006, 155:63-73.
17. Kamino T., Yaguchi T., Ohnishi T., Ishitani T., Osumi M. Application of a FIB-STEM system for 3D observation of a resin-embedded yeast cell. Journal of Electron Microscopy 2004, 53:563-566.
18. Kempshall B.W., Giannuzzi L.A., Prenitzer B.I., Stevie F.A., Da S.X. Comparative evaluation of protective coatings and focused ion beam chemical vapor deposition processes. Journal of Vacuum Science and Technology B 2002, 20:286-290.
19. Koizumi H., Ichikawa T., Taguchi M., Kobayashi Y., Namba H. Chemical effects of heavy ion beams on organic materials. Nuclear Instruments and Methods B 2003, 206:1124-1127.
20. Kolibal M., Matlocha T., Vystavel T., Sikola T. Low energy focused ion beam milling of silicon and germanium nanostructures. Nanotechnology 2011, 22.
21. Magonov S.N., Elings V., Whangbo M.H. Phase imaging and stiffness in tapping-mode atomic force microscopy. Surface Science 1997, 375:L385-L391.
22. Marcus M.S., Eriksson M.A., Sasaki D.Y., Carpick R.W. In-plane contributions to phase contrast in intermittent contact atomic force microscopy. Ultramicroscopy 2003, 97:145-150.
23. Martinez N.F., Garcia R. Measuring phase shifts and energy dissipation with amplitude modulation atomic force microscopy. Nanotechnology 2006, 17:S167-S172.
24. Orloff J., Utlaut M.W., Swanson L. High Resolution Focused Ion Beams: Fib and its Applications: the Physics of Liquid Metal Ion Sources and Ion Optics and their Application to Focused Ion Beam Technology 2003, Kluwer Academic/Plenum, New York, London.
25. Oshima A., Murata K., Oka T., Miyoshi N., Matsuura A., Kudo H., Murakami T., Katoh E., Washio M., Hama Y. Heavy ion beam induced phenomena in polytetrafluoroethylene. Nuclear Instruments and Methods B 2007, 265:314-319.
26. Prewett P.D., Mair G.L.R. Focused Ion Beams from Liquid Metal Ion Sources 1991, John Wiley and Sons, New York.
27. Rubanov S., Munroe P.R. FIB-induced damage in silicon. Journal of Microscopy - Oxford 2004, 214:213-221.
28. Seki S., Maeda K., Kunimi Y., Tagawa S., Yoshida Y., Kudoh H., Sugimoto M., Morita Y., Seguchi T., Iwai T., Shibata H., Asai K., Ishigure K. Ion beam induced crosslinking reactions in poly(di-n-hexylsilane). Journal of Physical Chemistry B 1999, 103:3043-3048.
29. Shannon C.U., Prenitzer B.I., Giannuzzi L.A., Brown S.R., Shofner T.L., Rossi B., Vartuli C.A., Irwin R.B., Stevie F.A. STEM analysis of FIB damage in silicon. Institute of Physics Conference Series 2000, 165:177-178.
30. Sugiyama M., Sigesato G. A review of focused ion beam technology and its applications in transmission electron microscopy. Journal of Electron Microscopy 2004, 53:527-536.
31. Wong K.C., Haslauer C.M., Anantharamaiah N., Pourdeyhimi B., Batchelor A.D., Griffis D.P. Focused ion beam characterization of bicomponent polymer fibers. Microscopy and Microanalysis 2010, 16:282-290.
32. Ziegler J.F., Ziegler M.D., Biersack J.P. SRIM-the stopping and range of ions in metter (2010). Nuclear Instruments and Methods in Physics Research B 2010, 268:1818-1823.