Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays

Optical Engineering

Volumn 52, Issue 3, 2013, Pages

  Merthe, Daniel J ^a   Yashchuk, Valeriy V ^a   Goldberg, Kenneth A ^a   Kunz, Martin ^a   Tamura, Nobumichi ^a   McKinney, Wayne R ^a   Artemiev, Nikolay A ^a   Celestre, Richard S ^a   Morrison, Gregory Y ^a   Anderson, Erik H ^a   Smith, Brian V ^a   Domning, Edward E ^a   Rekawa, Senajith B ^a   Howard A Padmore, ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Hartmann test; Knife edge measurement; Metrology of x ray optics; Nano focusing; Shearing interferometry; Synchrotron radiation

Indexed keywords

ADVANCED LIGHT SOURCE; DIFFRACTION-LIMITED BEAMS; HARTMANN TESTS; KIRKPATRICK-BAEZ MIRROR; KNIFE EDGE; LATERAL SHEARING INTERFEROMETER; NANO-FOCUSING; SHEARING INTERFEROMETRY;

DIFFRACTION; LIGHT SOURCES; MIRRORS; OPTIMIZATION; SHEARING; SUN; SYNCHROTRON RADIATION;

X RAYS;

EID: 84879581887     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.OE.52.3.033603     Document Type: Article

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