New procedures for the adjustment of elliptic ally bent mirrors with the long trace profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  McKinney, Wayne R ^a   Irick, Steven C ^a   Kirschman, Jonathan L ^a   MacDowell, Alastair A ^a   Warwick, Tony ^a   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Adaptive optic; Elliptical bender; Long trace profiler; Mirror; Synchrotron radiation; X ray

Indexed keywords

ELLIPTICAL BENDER; KIRKPATRICK-BAEZ (KB); LONG TRACE PROFILER (LTP);

ADAPTIVE OPTICS; REGRESSION ANALYSIS; SYNCHROTRON RADIATION; X RAYS;

MIRRORS;

EID: 42149157383     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.736860     Document Type: Conference Paper

References (21)

1. Y. Wenbing, M. Feser, A. F. Lyon, F. Duewer and W. Yuxin, "Pathways to sub-10nm x-ray imaging using zone plate lens," in Design and Microfabrication of Novel X-Ray Optics II. Denver, CO (2004).
2. V. Nazmov, E. Reznikova, M. Boerner, J. Mohr, V. Saile, A. Snigerev, I. Snigireva, M. DiMichiel, M. Drakopoulos, R. Simon and M. Grigoriev, "Refractive lenses fabricated by deep SR lithography and LIGA technology for X-ray energies from 1 keV to 1 MeV," in Eighth International Conference on Synchrotron Radiation Instrumentation. San Francisco, CA (2004).
3. T. Warwick, N. Andresen, J. Comins, A. Franck, M. Gilles, T. Tonnessen and T. Tyliszczak, "Large aperture micro-focus KB mirrors for spectroscopy experiments at the Advanced Light Source," in Eighth International Conference on Synchrotron Radiation Instrumentation. San Francisco, CA (2004).
4. P. Kirkpatrick and A. V. Baez, "Formation of optical images by X-rays," Journal of the Optical Society of America 38(766-774 (1948)
5. O. Hignette, A. Freund and E. Chinchio, "Incoherent X-ray mirror surface metrology," in Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors. San Diego, CA (1997).
6. M. R. Howells and D. Lunt, "Design considerations for adjustable-curvature, high-power, X-ray mirrors based on elastic bending," Optical Engineering 32(8), 1981-1989 (1993)
7. M. R. Howells, D. Cambie, R. M. Duarte, S. Irick, A. MacDowell, H. A. Padmore, T. Renner, R. Seungyu and R. Sandler, "Theory and practice of elliptically bent X-ray mirrors," Optical Engineering 39(10), 2748-2762 (2000)
8. R. J. Roark, Formulas for Stress and Strain, McGraw-Hill, New York (1964).
9. S. Ferrer, M. Krisch, F. de Bergevin and F. Zontone, "Evaluation of the anticlastic curvature of elastically bent crystals for X-ray focusing optics," Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 311(3), 444-447 (1992)
10. V. V. Yashchuk, "Positioning errors of pencil-beam interferometers for long trace profilers," in Advances in X-Ray/EUV Optics, Components, and Applications, pp. 63170A-63112, SPIE, San Diego, CA, USA (2006).
11. R. L. Plackett, Principles of Regression Analysis, Clarendon Press, Oxford (1960).
12. D. Hudson, Lectures on Elementary Statistics and Probability, CERN, Geneva (1963).
13. J. Neter and W. Wasserman, Applied Linear Statictical Models, Inwin-Dorsey International, London (1974).
14. M. Kendall and A. Stuart, The Advanced Theory of Statistics, Oxford University Press, New York (1979).
15. A. Fitzgibbon, M. Pilu and R. B. Fisher, "Direct least square fitting of ellipses," IEEE Transactions on Pattern Analysis and Machine Intelligence 21(5), 476-480 (1999)
16. G. A. Watson, "Least squares fitting of circles and ellipses to measured data," Bit 39(1), 176-191 (1999)
17. S. Sullivan, "Scientific Computing and Associated Fields Resource Guide," Mathcom (2006).
18. H. A. Padmore, M. R. Howells and W. R. McKinney, "Grazing-Incidence Monochromators for Third Generation Synchrotron Radiation Sources," in Vacuum Ultraviolet Spectroscopy II Samson and Ederer, Eds., Academic Press (1998).
19. V. V. Yashchuk, E. L. Church, M. Howells, W. R. McKinney and P. Z. Takacs, "21st Century Metrology for Synchrotron Radiation Optics - Understanding How to Specify and Characterize Optics," in The 3rd International Workshop on Metrology for X-ray Optics, Pohang Accelerator Laboratory, Daegu, Korea (2006).
20. E. L. Church and P. Z. Takacs, "Specification of surface figure and finish in terms of system performance," Applied Optics 32(19), 3344-3353 (1993)
21. E. L. Church and P. Z. Takacs, "Specification of glancing- and normal-incidence x-ray mirrors," Optical Engineering 34(2), 353-360 (1995)