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Volumn 40, Issue 17, 2001, Pages 2886-2894

Fourier-transform method of phase-shift determination

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; INTERFEROMETRY; MATHEMATICAL MODELS; MATRIX ALGEBRA; SPURIOUS SIGNAL NOISE;

EID: 0012593604     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.002886     Document Type: Article
Times cited : (128)

References (36)
  • 1
    • 0002834304 scopus 로고
    • Installation et utilisation du comparateur photoelec-trique et interferential du bureau international des poids et mesures
    • P. Carre, “Installation et utilisation du comparateur photoelec-trique et interferential du bureau international des poids et mesures,” Metrologia 2, 13-23 (1966).
    • (1966) Metrologia , vol.2 , pp. 13-23
    • Carre, P.1
  • 2
    • 0001762831 scopus 로고
    • Interference phase measurement
    • R. Crane, “Interference phase measurement,” Appl. Opt. 8, 538-542 (1969).
    • (1969) Appl. Opt. , vol.8 , pp. 538-542
    • Crane, R.1
  • 4
    • 0016577701 scopus 로고
    • Use of an ac heterodyne lateral shear interferometer with real-time wavefront corrections systems (For telescopes)
    • J. C. Wyant, “Use of an ac heterodyne lateral shear interferometer with real-time wavefront corrections systems (for telescopes),” Appl. Opt. 14, 2622-2626 (1975).
    • (1975) Appl. Opt. , vol.14 , pp. 2622-2626
    • Wyant, J.C.1
  • 6
    • 84928815585 scopus 로고
    • Digital phase-shifting interferometry: A simple error-compensating phase-calculation algorithm
    • P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase-calculation algorithm,” Appl. Opt. 26, 2504-2506 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 2504-2506
    • Hariharan, P.1    Oreb, B.F.2    Eiju, T.3
  • 7
    • 84893997835 scopus 로고
    • Design and assessment of symmetrical phase-shifting algorithms
    • K. G. Larkin and B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms,” J. Opt. Soc. Am. A 9, 1740-1748 (1992).
    • (1992) J. Opt. Soc. Am. A , vol.9 , pp. 1740-1748
    • Larkin, K.G.1    Oreb, B.F.2
  • 8
    • 0027652424 scopus 로고
    • New compensating four-phase algorithm for phase-shift interferometry
    • J. Schwider, O. Falkenstorfer, H. Schreiber, A. Zoller, and N. Streibel, “New compensating four-phase algorithm for phase-shift interferometry,” Opt. Eng. 32, 1883-1885 (1995).
    • (1995) Opt. Eng. , vol.32 , pp. 1883-1885
    • Schwider, J.1    Falkenstorfer, O.2    Schreiber, H.3    Zoller, A.4    Streibel, N.5
  • 9
    • 0027639231 scopus 로고
    • Phase stepping: A new self-calibrating algorithm
    • Y. Surrel, “Phase stepping: a new self-calibrating algorithm,” Appl. Opt. 32, 3598-3600 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 3598-3600
    • Surrel, Y.1
  • 10
    • 0029288253 scopus 로고
    • Phase shifting for nonsinusoidal waveforms with phase-shift errors
    • K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, “Phase shifting for nonsinusoidal waveforms with phase-shift errors,” J. Opt. Soc. Am. A 12, 761-768 (1995).
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 761-768
    • Hibino, K.1    Oreb, B.F.2    Farrant, D.I.3    Larkin, K.G.4
  • 11
    • 0002128002 scopus 로고    scopus 로고
    • Design of algorithms for phase measurements by the use of phase stepping
    • Y. Surrel, “Design of algorithms for phase measurements by the use of phase stepping,” Appl. Opt. 35, 51-60 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 51-60
    • Surrel, Y.1
  • 12
    • 0000200320 scopus 로고    scopus 로고
    • General methods for generating phase-shifting interferometry algorithms
    • D. W. Phillion, “General methods for generating phase-shifting interferometry algorithms,” Appl. Opt. 36, 8098-8115 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 8098-8115
    • Phillion, D.W.1
  • 13
    • 0005334627 scopus 로고
    • Spatial and temporal phase-measurement techniques: A comparison of major error sources in one dimension
    • G. M. Brown, O. Y. Kwon, M. Kujawinska, and G. T. Reid, eds., Proc. SPIE 1755
    • J. Schmidt and K. Creath, “Spatial and temporal phase-measurement techniques: a comparison of major error sources in one dimension,” in Interferometry: Techniques and Analysis, G. M. Brown, O. Y. Kwon, M. Kujawinska, and G. T. Reid, eds., Proc. SPIE 1755, 202-211 (1992).
    • (1992) Interferometry: Techniques and Analysis , pp. 202-211
    • Schmidt, J.1    Creath, K.2
  • 14
    • 77955701859 scopus 로고
    • Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • P. J. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723-4730 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 4723-4730
    • De Groot, P.J.1
  • 15
    • 84975597908 scopus 로고
    • Linear approximation for measurement errors in phase-shifting interferometry
    • J. Wingerden, H. J. Frankena, and C. Smorenburg, “Linear approximation for measurement errors in phase-shifting interferometry,” Appl. Opt. 30, 2718-2729 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 2718-2729
    • Wingerden, J.1    Frankena, H.J.2    Smorenburg, C.3
  • 16
    • 0346663134 scopus 로고    scopus 로고
    • Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry
    • K. Hibino, “Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry,” Appl. Opt. 36, 2084-2093 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 2084-2093
    • Hibino, K.1
  • 17
    • 84975647334 scopus 로고
    • Effect of intensity error correlation on the computed phase of phase-shifting interferometry
    • C. P. Brophy, “Effect of intensity error correlation on the computed phase of phase-shifting interferometry,” J. Opt. Soc. Am. A 7, 542-551 (1990).
    • (1990) J. Opt. Soc. Am. A , vol.7 , pp. 542-551
    • Brophy, C.P.1
  • 18
    • 84975629124 scopus 로고
    • Statistical properties of phase-shift algorithms
    • C. Rathjen, “Statistical properties of phase-shift algorithms,” J. Opt. Soc. Am. A 12, 1997-2008 (1995).
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1997-2008
    • Rathjen, C.1
  • 20
    • 0028539430 scopus 로고
    • Numerical correction of reference phases in phase-shifting interferometry by iterative least-squares fitting
    • G.-S. Han and S.-W. Kim, “Numerical correction of reference phases in phase-shifting interferometry by iterative least-squares fitting,” Appl. Opt. 33, 7321-7325 (1994).
    • (1994) Appl. Opt. , vol.33 , pp. 7321-7325
    • Han, G.-S.1    Kim, S.-W.2
  • 21
    • 0001357310 scopus 로고    scopus 로고
    • Accelerated phasemeasuring algorithm of least squares for phase-shifting interferometry
    • S. -W. Kim, M.-G. Kang, and G.-S. Han, “Accelerated phasemeasuring algorithm of least squares for phase-shifting interferometry,” Opt. Eng. 36, 3101-3106 (1997).
    • (1997) Opt. Eng. , vol.36 , pp. 3101-3106
    • Kim, S.-W.1    Kang, M.-G.2    Han, G.-S.3
  • 22
    • 0031193197 scopus 로고    scopus 로고
    • Statistical self-calibrating algorithm for three-sample phase-shift interferometry
    • A. Dobroiu, P. C. Lagofatu, D. Apostol, and V. Damian, “Statistical self-calibrating algorithm for three-sample phase-shift interferometry,” Meas. Sci. Technol. 8, 738-745 (1997).
    • (1997) Meas. Sci. Technol. , vol.8 , pp. 738-745
    • Dobroiu, A.1    Lagofatu, P.C.2    Apostol, D.3    Damian, V.4
  • 23
    • 0032166065 scopus 로고    scopus 로고
    • Statistical self-calibrating algorithm for phase-shift interferometry based on a smoothness assessment of the intensity offset map
    • A. Dobroiu, D. Apostol, V. Nascov, and V. Damian, “Statistical self-calibrating algorithm for phase-shift interferometry based on a smoothness assessment of the intensity offset map,” Meas. Sci. Technol. 9, 1451-1455 (1998).
    • (1998) Meas. Sci. Technol. , vol.9 , pp. 1451-1455
    • Dobroiu, A.1    Apostol, D.2    Nascov, V.3    Damian, V.4
  • 24
    • 0000310463 scopus 로고    scopus 로고
    • Algorithm immune to tilt phase-shifting error for phase-shifting interferometers
    • M. Chen, H. Guo, and C. Wei, “Algorithm immune to tilt phase-shifting error for phase-shifting interferometers,” Appl. Opt. 39, 3894-3898 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 3894-3898
    • Chen, M.1    Guo, H.2    Wei, C.3
  • 25
    • 0021468528 scopus 로고
    • Generalized data reduction for heterodyne interferometry
    • J. E. Greivenkamp, “Generalized data reduction for heterodyne interferometry,” Opt. Eng. 23, 350-352 (1984).
    • (1984) Opt. Eng. , vol.23 , pp. 350-352
    • Greivenkamp, J.E.1
  • 26
    • 85010176150 scopus 로고
    • Phase shifting interferometry
    • 2nd ed. D. Malacara, ed. (Wiley, New York
    • J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometry,” in Optical Shop Testing, 2nd ed. D. Malacara, ed. (Wiley, New York, 1992), pp. 522-524.
    • (1992) Optical Shop Testing , pp. 522-524
    • Greivenkamp, J.E.1    Bruning, J.H.2
  • 27
    • 0000682663 scopus 로고
    • Fringe-pattern analysis using a 2-D Fourier transform
    • D. J. Bone, H.-A. Bachor, and R. J. Sandeman, “Fringe-pattern analysis using a 2-D Fourier transform,” Appl. Opt. 25, 1653-1660 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 1653-1660
    • Bone, D.J.1    Bachor, H.-A.2    Sandeman, R.J.3
  • 28
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160 (1982).
    • (1982) J. Opt. Soc. Am. , vol.72 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 29
    • 84873559847 scopus 로고
    • Interferogram analysis using an accurate fully automatic algorithm
    • K. A. Nugent, “Interferogram analysis using an accurate fully automatic algorithm,” Appl. Opt. 24, 3101-3105 (1985).
    • (1985) Appl. Opt. , vol.24 , pp. 3101-3105
    • Nugent, K.A.1
  • 30
    • 0009967889 scopus 로고    scopus 로고
    • Ph.D. dissertation (University of California, Berkeley, Berkeley, Calif
    • K. A. Goldberg, “EUV interferometry,” Ph.D. dissertation (University of California, Berkeley, Berkeley, Calif., 1997).
    • (1997) EUV Interferometry
    • Goldberg, K.A.1
  • 31
    • 0000805935 scopus 로고    scopus 로고
    • Extreme-ultraviolet phase-shifting point-diffraction interferometer: A wave-front metrology tool with subangstrom reference-wave accuracy
    • P. P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. At-twood, and J. Bokor, “Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy,” Appl. Opt. 38, 7252-7263 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 7252-7263
    • Naulleau, P.P.1    Goldberg, K.A.2    Lee, S.H.3    Chang, C.4    At-Twood, D.5    Bokor, J.6
  • 33
    • 0033267350 scopus 로고    scopus 로고
    • EUV interferometric measurements of diffraction-limited optics
    • K. A. Goldberg, P. Naulleau, and J. Bokor, “EUV interferometric measurements of diffraction-limited optics,” J. Vac. Sci. Technol. B 17, 2982-2986 (1999).
    • (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 2982-2986
    • Goldberg, K.A.1    Naulleau, P.2    Bokor, J.3
  • 34
    • 84928815585 scopus 로고
    • Digital phase-shifting interferometry: A simple error-compensating phase calcula tion algorithm
    • P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calcula tion algorithm,” Appl. Opt. 26, 2504-2505 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 2504-2505
    • Hariharan, P.1    Oreb, B.F.2    Eiju, T.3
  • 35
    • 0032607653 scopus 로고    scopus 로고
    • Dual-domain point diffraction interferometer
    • P. P. Naulleau and K. A. Goldberg, “Dual-domain point diffraction interferometer,” Appl. Opt. 38, 3523-3533 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 3523-3533
    • Naulleau, P.P.1    Goldberg, K.A.2


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