An experimental apparatus for diffraction-limited soft x-ray nano-focusing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8139, Issue , 2011, Pages

  Merthe, Daniel J ^a   Goldberg, Kenneth A ^a   Yashchuk, Valeriy V ^a   Yuan, Sheng ^a   McKinney, Wayne R ^a   Celestre, Richard ^a   Mochi, Iacopo ^a   MacDougall, James ^a   Morrison, Gregory Y ^a   Rakawa, Senajith B ^a   Anderson, Erik ^a   Smith, Brian V ^a   Domning, Edward E ^a   Warwick, Tony ^a   Padmore, Howard ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Hartman test; Knife edge measurement; Metrology of x ray optics; Nano focusing; Shearing interferometry; Synchrotron radiation

Indexed keywords

ADVANCED LIGHT SOURCES; AT-WAVELENGTH; BEAM LINES; BENT MIRRORS; DIFFRACTION LIMITED; EXPERIMENTAL APPARATUS; EXPERIMENTAL TECHNIQUES; GLANCING ANGLE; HARTMAN TEST; HARTMANN TESTS; HIGH BRIGHTNESS; HIGH RESOLUTION; HIGH-ACCURACY; IN-SITU; KIRKPATRICK-BAEZ MIRROR; KNIFE EDGE; LATERAL SHEARING INTERFEROMETRY; NANO-FOCUSING; NUMERICAL APERTURE; SHEARING INTERFEROMETRY; SLOPE MEASUREMENT; SOFT X-RAY; SPOT SIZES; VISIBLE LIGHT; WAVEFRONT MEASUREMENT;

DIFFRACTION; ELECTRON DIFFRACTION APPARATUS; FOCUSING; FREE ELECTRON LASERS; INTERFEROMETRY; LIGHT; LIGHT SOURCES; MIRRORS; SHEARING; SYNCHROTRONS; WAVEFRONTS;

X RAYS;

EID: 80054079902     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.894116     Document Type: Conference Paper

References (23)

1. Yuan, S., Yashchuk, V. V., Goldberg, K. A., Celestre, R., McKinney, W. R., Morrison, G. Y., Warwick, T., and Padmore, H. A., "Development of in situ, at-wavelength metrology for soft X-ray nano-focusing," Nucl. Instrum. Meth. A, 649, 160-162 (2011).
2. Yuan, S., Goldberg, K. A., Yashchuk, V. V., Celestre, R., Mochi, I., MacDougall, J., Morrison, G. Y., Smith, B. V., Domning, E. E., McKinney, W. R., and Warwick, T., "At-wavelength optical metrology development at the ALS," Proc. SPIE, 7801, 78010D (2010).
3. Naulleau, P. P., Goldberg, K. A., and Bokor, J., "Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system " J. Vac. Sci. Technol. B, 18(6), 2939-2943 (2000).
4. Stewart, D., "A Platform with Six Degrees of Freedom," Proc. Institution of Mechanical Engineers (UK), 180 Pt. 1(15), (1965).
5. Yuan, S., Goldberg, K. A., Yashchuk, V. V., Celestre, R., McKinney, W. R., Morrison, G., Macdougall, J., Mochi, I., and Warwick, T., "Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror," Nucl. Instrum. Meth. A, 635(2011), S58-S63 (2010).
6. Yuan, S., Church, M., Yashchuk, V. V., Goldberg, K. A., Celestre, R. S., McKinney, W. R., Kirschman, J., Morrison, G., Noll, T., Warwick, T., and Padmore, H. A., "Elliptically Bent X-Ray Mirrors with Active Temperature Stabilization," X-Ray Opt. Instrum., 2010, 784732 (2010).
7. Yuan, S., "Surface Slope Metrology on Deformable Soft X-ray Mirrors," Lawrence Berkeley National Laboratory(LBNL-2645E), (2010).
8. Howells, M. R., Cambie, D., Duarte, R. M., Irick, S., MacDowell, A. A., Padmore, H. A., Renner, T. R., Rah, S., and Sandler, R., "Theory and Practice of Elliptically Bent X-ray Mirrors," Opt. Eng., 39(10), 2748-2762 (2000).
9. McKinney, W. R., Irick, S. C., Kirschman, J. L., MacDowell, A. A., Warwick, T., and Yashchuk, V. V., "New procedures for the adjustment of elliptically bent mirrors with the long trace profiler," Proc. SPIE, 6704, 67040G (2007).
10. McKinney, W. R., Kirschman, J. L., MacDowell, A. A., Warwick, T., and Yashchuk, V. V., "Optimal tuning and calibration of bendable mirrors with slope-measuring profilers," Opt. Eng., 48(8), (2009).
11. Hignette, O., Freund, A. K., and Chinchio, E., "Incoherent x-ray mirror surface metrology," Proc. SPIE, 3152, 188-199 (1997).
12. Naulleau, P. P., Batson, P., Denham, P., Richardson, D., and Underwood, J., "An in situ scanning-slit alignment system for Kirkpatrick-Baez optics," Opt. Commun., 212, 225-233 (2002).
13. Mercère, P., Zeitoun, P., Idir, M., Pape, S. L., Douillet, D., Levecq, X., Dovillaire, G., Bucourt, S., Kenneth A. Goldberg, Naulleau, P. P., and Rekawa, S., "Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy," Opt. Lett., 28(17), 1534-1536 (2003).
14. Gaviola, E., "On the quantitative use of the foucault knife-edge test," J. Opt. Soc. Am., 26, 163-169 (1936).
15. Vandenberg, D. E., Humbel, W. D., and Werthelmer, A., "Quantitative evaluation of optical surfaces by means of an improved Foucault test approach," Opt. Eng., 32(8), 1951-1954 (1993).
16. Cheng, H. B., Yam, Y., and Tong, H., "A quantitative knife-edge testing method for local deformation evaluation in optical aspheric fabrication," Proc. of the 3rd Annual IEEE Conference on Automation Science and Engineering, 818-822 (2007).
17. Malacara, D., [Optical Shop Testing] John Wiley & Sons, Hoboken(2007).
18. Kirschman, J. L., Domning, E. E., McKinney, W. R., Morrison, G. Y., Smith, B. V., and Yashchuk, V. V., "Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory," Proc. SPIE, 7077, 70770A (2008).
19. McKinney, W. R., Anders, M., Barber, S. K., Domning, E. E., Lou, Y., Morrison, G. Y., Salmassi, F., Smith, B. V., and Yashchuk, V. V., "Studies in optimal configuration of the LTP," Proc. SPIE, 7801, 780106 (2010).
20. Yashchuk, V. V., "Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler," Nucl. Instrum. Meth. A, 616(2-3), 212-223 (2009).
21. Takeda, M., Ina, H., and Kobayashi, S., "Fourier-transform method of fringe-pattern analysis for computerbased topography and interferometry," J. Opt. Soc. Am., 72(1), 156-160 (1981).
22. Bone, D. J., Bachor, H.-A., and Sandeman, R. J., " Applied Optics, 25 (10)
23. "Fringe-pattern analysis using a 2-D Fourier transform," Appl. Opt., 25(10), 1653-1660 (1986).