At-wavelength optical metrology development at the ALS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7801, Issue , 2010, Pages

  Yuan, Sheng ^a   Goldberg, Kenneth A ^a   Yashchuk, Valeriy V ^a   Celestre, Richard ^a   Mochi, Iacopo ^a   Macdougall, James ^a   Morrison, Gregory Y ^a   Smith, Brian V ^a   Domning, Edward E ^a   McKinney, Wayne R ^a   Warwick, Tony ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

at wavelength; interferometer; mirror alignment; nano focusing; optical metrology; slope measurement; synchrotron radiation; x ray optics

Indexed keywords

AT-WAVELENGTH; MIRROR ALIGNMENT; NANO-FOCUSING; OPTICAL METROLOGY; SLOPE MEASUREMENT;

ALIGNMENT; FOCUSING; FREE ELECTRON LASERS; INTERFEROMETERS; LASERS; LIGHT SOURCES; MIRRORS; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAY OPTICS; X RAYS;

MEASUREMENTS;

EID: 78049353983     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.859946     Document Type: Conference Paper

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