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Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 649, Issue 1, 2011, Pages 160-162

Development of in situ, at-wavelength metrology for soft X-ray nano-focusing

(8) Yuan, Sheng a Yashchuk, Valeriy V a Goldberg, Kenneth A a Celestre, Richard a McKinney, Wayne R a Morrison, Gregory Y a Warwick, Tony a Padmore, Howard A a

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

KB mirror; Long trace profiler; Metrology; Optical slope metrology; Synchrotron radiation; Wavefront measurements; X ray

Indexed keywords

ADVANCED LIGHT SOURCES; ALIGNMENT METHODS; AT-WAVELENGTH; BEAM LINES; HIGH-ACCURACY; IN-SITU; KB MIRROR; KIRKPATRICK-BAEZ MIRROR; LONG TRACE PROFILER; NANO-FOCUSING; OPTICAL SLOPE METROLOGY; SLOPE MEASUREMENT TECHNIQUE; SOFT X-RAY; SPOT SIZES; WAVEFRONT MEASUREMENTS;

LIGHT SOURCES; MIRRORS; OPTICAL TESTING; UNITS OF MEASUREMENT; WAVEFRONTS; X RAYS;

MEASUREMENTS;

EID: 79961165924 PISSN: 01689002 EISSN: None Source Type: Journal
DOI: 10.1016/j.nima.2010.10.134 Document Type: Conference Paper

Times cited : (15)

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