Breaking the 10 nm barrier in hard-X-ray focusing

Nature Physics

Volumn 6, Issue 2, 2010, Pages 122-125

  Mimura, Hidekazu ^a   Handa, Soichiro ^a   Kimura, Takashi ^a   Yumoto, Hirokatsu ^b   Yamakawa, Daisuke ^a   Yokoyama, Hikaru ^a   Matsuyama, Satoshi ^a   Inagaki, Kouji ^a   Yamamura, Kazuya ^a   Sano, Yasuhisa ^a   Tamasaku, Kenji ^c   Nishino, Yoshinori ^c   Yabashi, Makina ^c   Ishikawa, Tetsuya ^c   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^c RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; CHEMICAL ANALYSIS; FOCUSING; MIRRORS; OPTICAL SYSTEMS; WAVEFRONTS;

DEFORMABLE MIRRORS; FOCUSING CONDITIONS; GRADED MULTILAYER MIRRORS; HARD-X-RAY FOCUSING; NANOMETRE RESOLUTION; SPATIAL RESOLUTION; STRUCTURE ANALYSIS; WAVEFRONT CORRECTION;

X RAYS;

EID: 76449087110     PISSN: 17452473     EISSN: 17452481     Source Type: Journal    
DOI: 10.1038/nphys1457     Document Type: Article

References (28)

1. Born, M. & Wolf, E. Principles of Optics Seventh edition 527-532 (Cambridge Univ. Press, 1999).
2. Morawe, C., Pecci, P., Peffern, J. C. & Ziegler, E. Design and performance of graded multilayers as focusing elements for X-ray optics. Rev. Sci. Instrum. 70, 3227-3232 (1999).
3. Signorato, R., Hignette, O. & Goulon, J. Multi-segmented piezoelectric mirrors as active/adaptive optics components. J. Synchrotron. Rad. 5, 797-800 (1998).
4. Mimura, H. et al. Efficient focusing of hard-X-rays to 25nm by a total reflection mirror. Appl. Phys. Lett. 90, 051903 (2007).
5. Suzuki, Y., Takeuchi, A., Takano, H. & Takenaka, H. Performance test of Fresnel zone plate with 50nm outermost zone width in hard X-ray region. Jpn. J. Appl. Phys. 44, 1994-1998 (2005).
6. Schroer, C. G. et al. Hard X-ray nanoprobe based on refractive X-ray lenses. Appl. Phys. Lett 87, 124103 (2005).
7. Kang, H. C. et al. Nanometer linear focusing of hard-X-rays by a multilayer Lue lens. Phy. Rev. Lett. 96, 127401 (2006).
8. Bergemann, C., Keymeulen, H. & van der Veen, J. F. Focusing X-ray beams to nanometer dimensions. Phy. Rev. Lett. 91, 204801 (2003).
9. Schroer, C. G. & Lengeler, B. Focusing hard-X-rays to nanometer dimensions by adiabatically focusing lenses. Phy. Rev. Lett. 94, 054802 (2005).
10. Morawe, Ch., Guigay, J.-P., Mocella, V. & Ferrero, C. An analytical approach to estimating aberrations in curved multilayer optics for hard X-rays: 2 interpretation and application to focusing experiments. Opt. Exp. 16, 16138-16150 (2008).
11. Varela, M. et al. Atomic-resolution imaging of oxidation states in manganites. Phy. Rev. B 79, 085117 (2009).
12. Kelly, T. F. & Miller, M. K. Atom probe tomography. Rev. Sci. Instrum. 78, 031101 (2007).
13. Albert, O., Sherman, L., Mourou, G., Norris, T. B. & Vdovin, G. Smart microscope: An adaptive optics learning system for aberration correction in multiphoton confocal microscopy. Opt. Lett. 25, 52-54 (2000).
14. Hignette, O., Cloetens, P., Rostaing, G., Bernard, P. & Morawe, C. Efficient sub 100nm focusing of hard-X-rays. Rev. Sci. Instrum. 76, 063709 (2005).
15. Signorato, R., Häusermann, D., Somayazulu, M. & Carré, J.-F. Performance of an adaptiveμ-focusing Kirkpatrick-Baez system for high pressure studies at the Advanced Photon Source. Proc. SPIE-Int. Soc. Opt. Eng. 5193, 112-123 (2004).
16. Kimura, T. et al. Wavefront control system for phase compensation in hard-X-ray optics. Jpn. J. Appl. Phys. 48, 072503 (2009).
17. Smartt, R. N. & Steel, W. H. Theory and application of point-diffraction interferometers. Jpn. J. Appl. Phys. 14, 351-356 (1975).
18. Yumoto, H. et al. At-wavelength figure metrology of hard-X-ray focusing mirrors. Rev. Sci. Instrum. 77, 063712 (2006).
19. Mimura, H. et al. Direct determination of the wave field of an X-ray nanobeam. Phy. Rev. A 77, 015812 (2008).
20. Yamauchi, K., Mimura, H., Inagaki, K. & Mori, Y. Figuring with subnanometre-level accuracy by numerically controlled elastic emission machining. Rev. Sci. Instrum. 73, 4028-4033 (2002).
21. Yamauchi, K. et al. Microstitching interferometry for X-ray reflective optics. Rev. Sci. Instrum. 74, 2894-2898 (2003).
22. Mimura, H. et al. Relative angle determinable stitching interferometry for hard-X-ray reflective optics. Rev. Sci. Instrum. 76, 045102 (2005).
23. Tamasaku, K. et al. SPring-8 RIKEN beamline III for coherent X-ray optics. Nucl. Instrum. Methods 467-468, 686-689 (2001).
24. Brady, G. R & Fienup, J. R. Nonlinear optimization algorithm for retrieving the full complex pupil function. Opt. Exp. 14, 474-486 (2006).
25. Tamasaku, K. & Ishikawa, T. Interference between Compton scattering and X-ray parametric down-conversion. Phys. Rev. Lett. 98, 244801 (2007).
26. Mimura, H. et al. Focusing mirror for X-ray free-electron lasers. Rev. Sci. Instrum. 79, 083104 (2008).
27. Schwinger, J. On gauge invariance and vacuum polarization. Phys. Rev. B 82, 664-679 (1951).
28. Fienup, J. R. Phase retrieval algorithms - a comparison. Appl. Opt. 21, 2758-2769 (1982).