Incoherent x-ray mirror surface metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 188-199

  Hignette, Olivier ^a   Freund, Andreas K ^a   Chinchio, Elia ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Active optics; Microfocusing; Multilayers; Surface metrology; Synchrotron radiation; X ray mirrors

Indexed keywords

ELECTROMAGNETIC WAVES; INSTRUMENT ERRORS; MIRRORS; MULTILAYERS; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAYS;

ACTIVE OPTICS; BEAM LINES; ENERGY TUNABILITY; IN-SITU; LATERAL RESOLUTIONS; LONG TRACE PROFILERS; MICROFOCUSING; MIRROR SURFACES; SPOT SIZES; SURFACE METROLOGY; SURFACE SLOPE; SYNCHROTRON BEAMS; WAVE FRONTS; X-RAY MIRRORS;

SURFACES;

EID: 58749109049     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295559     Document Type: Conference Paper

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