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Volumn 41, Issue 20, 2012, Pages 7-17

Fabrication process for electromagnetic actuators compatible with polymer based microfluidic devices

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL APPLICATIONS; ELECTROMAGNETIC ACTUATORS; FABRICATION PROCESS; MAGNETIC NANOCOMPOSITES; MICRO-FLUIDIC DEVICES; MICRO-MOLDING PROCESS; NANOCOMPOSITE POLYMERS; POLYDIMETHYLSILOXANE MEMBRANE;

EID: 84879546517     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3687433     Document Type: Conference Paper
Times cited : (96)

References (33)
  • 1
    • 18744363890 scopus 로고    scopus 로고
    • Technologies for nanofluidics systems: Top-down vs. bottom-up. A review
    • D. Mijatovic, J. C. Eijkel, and V. den Berg., "Technologies for nanofluidics systems: top-down vs. bottom-up. a review." in Lab on a Chip., 5, (2005).
    • (2005) Lab on a Chip , vol.5
    • Mijatovic, D.1    Eijkel, J.C.2    Den Berg, V.3
  • 2
    • 41849096397 scopus 로고    scopus 로고
    • Nanofludic devices and their applications
    • P. Abgrall, and N. T. Nguyen., "Nanofludic devices and their applications." in Anal. Chem., 80(7), (2008).
    • (2008) Anal. Chem. , vol.80 , Issue.7
    • Abgrall, P.1    Nguyen, N.T.2
  • 6
    • 84879546225 scopus 로고    scopus 로고
    • Poly(Methyl Methacrylate) (PMMA) Microfluidics Technology: Development and Characterization
    • Burnaby: Simon Fraser University
    • M. Rahbar, "Poly(Methyl Methacrylate) (PMMA) Microfluidics Technology: Development and Characterization." in Applied science, Master of applied science Burnaby: Simon Fraser University, (2009).
    • (2009) Applied Science, Master of Applied Science
    • Rahbar, M.1
  • 7
    • 33947157127 scopus 로고    scopus 로고
    • Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates
    • A. Bubendorfer, X. Liu, A.V. Ellis. "Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates," in Smart Materials and Structures, 16(2), 367 (2007).
    • (2007) Smart Materials and Structures , vol.16 , Issue.2 , pp. 367
    • Bubendorfer, A.1    Liu, X.2    Ellis, A.V.3
  • 8
    • 38849200414 scopus 로고    scopus 로고
    • Fabrication of complex multilevel microchannels in PDMS by using threedimensional photoresist masters
    • K.S. Yun, E. Yoon. "Fabrication of complex multilevel microchannels in PDMS by using threedimensional photoresist masters," in Lab on a Chip, 8(2), 245 (2008).
    • (2008) Lab on a Chip , vol.8 , Issue.2 , pp. 245
    • Yun, K.S.1    Yoon, E.2
  • 10
    • 0141495474 scopus 로고    scopus 로고
    • In vitro experiment of the pressure regulating valve for a glaucoma implant
    • K, 2003
    • B. Bae, H. Kee, S. Kim, Y. Lee, T. Sim, Y. Kim and K. Park K, 2003 "in vitro experiment of the pressure regulating valve for a glaucoma implant," in J. Micromech. Microeng, 13, 613 (2003).
    • (2003) J. Micromech. Microeng , vol.13 , pp. 613
    • Bae, B.1    Kee, H.2    Kim, S.3    Lee, Y.4    Sim, T.5    Kim, Y.6    Park, K.7
  • 11
    • 0036686923 scopus 로고    scopus 로고
    • Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment
    • B. Bae, N. Kim, H. Kee, S. H. Kim, Y. Lee, S. Lee and K. Park, "Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment" in J. Microelectromech. Syst. 11, 344 (2002).
    • (2002) J. Microelectromech. Syst. , vol.11 , pp. 344
    • Bae, B.1    Kim, N.2    Kee, H.3    Kim, S.H.4    Lee, Y.5    Lee, S.6    Park, K.7
  • 12
    • 0037765106 scopus 로고    scopus 로고
    • Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding
    • C. Fu, Z. Rummler and W. Chomburg, "Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding" in J. Micromech. Microeng., 13 S96 (2003).
    • (2003) J. Micromech. Microeng. , vol.13
    • Fu, C.1    Rummler, Z.2    Chomburg, W.3
  • 13
    • 41349103853 scopus 로고    scopus 로고
    • Simulated and experimental dynamic response characterization of an electromagnetic micro valve
    • R. Luharuka, S.LeBlanc, J. S. Bintoro, Y. H. Berthelot and P.J.Hesketh, "Simulated and experimental dynamic response characterization of an electromagnetic micro valve," in Sensors and Actuators A, 143, 399 (2008).
    • (2008) Sensors and Actuators A , vol.143 , pp. 399
    • Luharuka, R.1    LeBlanc, S.2    Bintoro, J.S.3    Berthelot, Y.H.4    Hesketh, P.J.5
  • 14
    • 0033720688 scopus 로고    scopus 로고
    • Design, fabrication, and testing of a bistable electromagnetically actuated microvalve
    • M. Capanu, J. G. Boyd and P. J. Hesketh, "Design, fabrication, and testing of a bistable electromagnetically actuated microvalve," in Jornal of microelectromechanical Systems, 9(2), 181 (2000).
    • (2000) Jornal of Microelectromechanical Systems , vol.9 , Issue.2 , pp. 181
    • Capanu, M.1    Boyd, J.G.2    Hesketh, P.J.3
  • 15
    • 31344475748 scopus 로고    scopus 로고
    • Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer
    • J. Sutanto, P. J. Hesketh and Y. H. Berthelot, "Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer," in J. Micromech. Microeng., 16, 266 (2006).
    • (2006) J. Micromech. Microeng. , vol.16 , pp. 266
    • Sutanto, J.1    Hesketh, P.J.2    Berthelot, Y.H.3
  • 16
    • 44249127716 scopus 로고    scopus 로고
    • Magnetically controlled valve for flow manipulation in polymer microfluidic devices
    • A. Gaspar, M. E. Piyasena, L. Daroczi, F. A. Gomez, "Magnetically controlled valve for flow manipulation in polymer microfluidic devices," in Microfluidics and Nanofluidics, 4(6), 525 (2008).
    • (2008) Microfluidics and Nanofluidics , vol.4 , Issue.6 , pp. 525
    • Gaspar, A.1    Piyasena, M.E.2    Daroczi, L.3    Gomez, F.A.4
  • 17
    • 0942300693 scopus 로고    scopus 로고
    • Magnetic MEMS: Key issues and some applications
    • D. Niarchos, "Magnetic MEMS: key issues and some applications," in Sensors and Actuators A, 109, 166 (2003).
    • (2003) Sensors and Actuators A , vol.109 , pp. 166
    • Niarchos, D.1
  • 19
    • 46149094852 scopus 로고    scopus 로고
    • Electrically controlled microvalves to integrate microchip polymerase chain reaction and capillary electrophoresis
    • G. V. Kaigala, V. N. Hoang and C. J. Backhouse, "Electrically controlled microvalves to integrate microchip polymerase chain reaction and capillary electrophoresis," in Lab on a Chip, 8, 1071 (2008).
    • (2008) Lab on a Chip , vol.8 , pp. 1071
    • Kaigala, G.V.1    Hoang, V.N.2    Backhouse, C.J.3
  • 24
  • 25
    • 35649021853 scopus 로고    scopus 로고
    • Design and analysis of a high pressure piezoelectric actuated microvalve
    • I. Fazal and M. C. Elwenspoek, "Design and analysis of a high pressure piezoelectric actuated microvalve," in J. Micromech. Microeng., 17, 2366 (2007).
    • (2007) J. Micromech. Microeng. , vol.17 , pp. 2366
    • Fazal, I.1    Elwenspoek, M.C.2
  • 26
    • 33745181656 scopus 로고    scopus 로고
    • Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control
    • C. Lee, E. H. Yang, S. M. Saeidi and J. M. Khodadadi, "Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control," in Journal of Microelectromechanical Systems, 15(3), (2006).
    • (2006) Journal of Microelectromechanical Systems , vol.15 , Issue.3
    • Lee, C.1    Yang, E.H.2    Saeidi, S.M.3    Khodadadi, J.M.4
  • 27
    • 54749108689 scopus 로고    scopus 로고
    • Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma
    • J. Han, B. Flachsbart, R. I. Masel and M. A. Shannon, "Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma," in J. Micromech. Micrieng, 18, 095015 (2008).
    • (2008) J. Micromech. Micrieng , vol.18 , pp. 095015
    • Han, J.1    Flachsbart, B.2    Masel, R.I.3    Shannon, M.A.4
  • 30
    • 12344262702 scopus 로고    scopus 로고
    • Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
    • N. Damean, B. A. Parviz, J. Ng Lee, T. Odom and G. M. Whitesides, "Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems," in J. Micromech. Micrieng., 15, 29 (2005).
    • (2005) J. Micromech. Micrieng. , vol.15 , pp. 29
    • Damean, N.1    Parviz, B.A.2    Ng Lee, J.3    Odom, T.4    Whitesides, G.M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.