Piezoelectrically actuated microvalves for micropropulsion applications

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 449-453

  Yang, Eui Hyeok ^a   Lee, Choonsup ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; PUMPS; VALVES (MECHANICAL);

DIFFERENTIAL PRESSURES; HANDLING CAPABILITY; HIGH PRESSURE; LEAK RATE; MAJOR ELEMENTS; MICRO VALVES; MICROPROPULSION APPLICATIONS; PIEZOELECTRIC STACK ACTUATORS; SOAP SOLUTION; STAINLESS STEEL HOUSING; STRESSED SILICON; VALVE COMPONENTS; VALVE DESIGN;

STAINLESS STEEL;

EID: 78249282955     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33783     Document Type: Conference Paper

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