Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates

Smart Materials and Structures

Volumn 16, Issue 2, 2007, Pages 367-371

  Bubendorfer, Andrea ^a   Liu, Xianming ^a   Ellis, Amanda V ^a,b  

^a CALLAGHAN INNOVATION   (New Zealand)

^b FLINDERS UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; PHOTORESISTS; PLASMA THEORY; PLASTICS MOLDING; STYRENE;

FACILE SEALING/COVALENT BONDING; POLYSTYRENE SUBSTRATES; RADIO-FREQUENCY PLASMA DISCHARGE (REPD);

POLYMETHYL METHACRYLATES;

EID: 33947157127     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/16/2/015     Document Type: Article

References (22)

1. McDonald J C et al 2002 Acc. Chem. Res. 35 491-9
2. Reno X et al 2001 J. Chromatogr. B 762 117-25
3. Wu H et al 2005 Lab Chip 5 1393-8
4. Guijt R M E et al 2001 Electrophoresis 22 235-41
5. Li S et al 2003 J. Micromech. Microeng. 13 732-8
6. Shaw M et al 2003 Microsyst. Technol. 10 1-6
7. Zhang J et al 2001 J. Micromech. Microeng. 11 20-6
8. Feng R et al 2003 J. Micromech. Microeng. 13 80-8
9. Larsson M P et al 2005 J. Micromech. Microeng. 15 2074-82
10. Bilenberg B et al 2004 J. Micromech. Microeng. 14 814-8
11. Berdichevsky Y et al 2004 Sensors Actuators B 97 402-8
12. Jo B-H et al 2000 J. Microelectromech. Syst. 9 76-81
13. Pitt W G et al 1989 J. Colloid Interface Sci. 133 223-7
14. Sayah A et al 2000 Sensors Actuators A 84 103-8
15. Becker H et al 2002 Talanta 56 267-87
16. Kirby B J et al 2004 Electrophoresis 25 203-13
17. Locascio L E et al 1999 J. Chromatogr. A 857 275-84
18. Li S et al 2003 IEEE T. Adv. Packaging vol 26 (Newton, MA: MicroChem Corporation) pp242-7
19. Murakami T et al 1998 J. Colloid Interface Sci. 202 37-44
20. Meincken M et al 2005 Polymer 46 203-8
21. Efimenko K et al 2002 J. Colloid Interface Sci. 254 306-15
22. ASTM D3363 ASTM International