Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 686-696

  Lee, Choonsup ^a   Yang, Eui Hyeok ^a   Saeidi, S Mahdi ^b   Khodadadi, Jay M ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b INTEL CORPORATION   (United States)

^c AUBURN UNIVERSITY   (United States)

Author keywords

Computational fluid dynamics (CFD); Liquid flow; Liquid compatible; Low power consumption; Microfluidics; Microvalve; Modeling; Piezoelectric; Proportional flow control

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; FLOW CONTROL; FLOW OF FLUIDS; FLOWMETERS; LIQUID PROPELLANTS; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; VALVES (MECHANICAL);

LIQUID FLOW CONTROL; MASS FLOW METER (MFM); MICROFLUIDICS; PIEZOELECTRICALLY ACTUATED MICROVALVE; PROPORTIONAL FLOW CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 33745181656     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876783     Document Type: Article

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