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Volumn 7646, Issue , 2010, Pages
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Fabrication of UV-micro-patternable permanent micro magnets for lab on a chip and MEMS
a
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Author keywords
Lab on a chip; MEMS; permanent micro magnets; SU 8
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Indexed keywords
ALLOY INGOTS;
AVERAGE PARTICLE SIZE;
COARSE POWDERS;
COERCIVITIES;
FINE POWDERS;
INERT ATMOSPHERES;
LAB ON A CHIP;
MAGNETIC POWDERS;
MATRIX;
MELT-SPUN;
MICROMAGNETS;
NANOCRYSTALLINE MICROSTRUCTURES;
REMANENT MAGNETIZATION;
SQUID MAGNETOMETERS;
UV LITHOGRAPHY;
VACUUM INDUCTION FURNACES;
WEIGHT PERCENTAGES;
BALL MILLING;
BIOSENSORS;
CERIUM;
CERIUM COMPOUNDS;
ELECTRIC FURNACES;
FABRICATION;
LITHOGRAPHY;
MAGNETIC MATERIALS;
MAGNETOMETERS;
NANOCRYSTALLINE ALLOYS;
NANOCRYSTALLINE MATERIALS;
NANOSENSORS;
NEODYMIUM;
VACUUM APPLICATIONS;
VACUUM FURNACES;
MAGNETS;
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EID: 77953393042
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.847288 Document Type: Conference Paper |
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Times cited : (8)
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References (11)
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