|
Volumn 7593, Issue , 2010, Pages
|
Fabrication and testing of integrated permanent micromagnets for microfluidic systems
a a a a b c c |
Author keywords
MEMS; Microfluidics; Permanent micro magnets; Soft lithography
|
Indexed keywords
ALLOY INGOTS;
AVERAGE PARTICLE SIZE;
BONDED MATERIALS;
COARSE POWDERS;
FINE MAGNETIC POWDERS;
FINE POWDERS;
INERT ATMOSPHERES;
MAGNETIC POWDERS;
MATRIX;
MELT-SPUN;
MICRO FLUIDIC SYSTEM;
MICROMAGNETS;
MICROPATTERNED;
NANOCRYSTALLINE MICROSTRUCTURES;
PERMANENT MICRO-MAGNETS;
POLYDIMETHYSILOXANE;
REMANENT MAGNETIZATION;
SOFT LITHOGRAPHY;
SQUID MAGNETOMETERS;
VACUUM INDUCTION FURNACES;
WEIGHT PERCENTAGES;
BALL MILLING;
FABRICATION;
LITHOGRAPHY;
MAGNETOMETERS;
MAGNETS;
MICROCHANNELS;
MICROSYSTEMS;
NANOCRYSTALLINE ALLOYS;
SILICONES;
VACUUM APPLICATIONS;
VACUUM FURNACES;
MICROFLUIDICS;
|
EID: 79955400988
PISSN: 16057422
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.840942 Document Type: Conference Paper |
Times cited : (15)
|
References (14)
|