Development of electroplated magnetic materials for MEMS

Journal of Magnetism and Magnetic Materials

Volumn 265, Issue 2, 2003, Pages 189-198

  Myung, Nosang V ^a   Park, D Y ^b,c   Yoo, B Y ^b   Sumodjo, Paulo T A ^b,d  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Hanbat National University   (South Korea)

^d UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Co based alloys; Electrodeposition; Hard magnetic materials; Magnetic films; MEMS NEMS; Soft magnetic materials

Indexed keywords

CORROSION RESISTANCE; ELECTRIC CONDUCTIVITY; ELECTROPLATING; MAGNETIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NICKEL;

MICROMOTORS;

MAGNETIC MATERIALS;

EID: 0042511985     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(03)00264-6     Document Type: Article

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